Focused-electron-beam-induced processing (FEBIP) for emerging applications in carbon nanoelectronics

Applied Physics A: Materials Science and Processing

Volumn 117, Issue 4, 2014, Pages 1659-1674

  Fedorov, Andrei G ^a,b   Kim, Songkil ^a   Henry, Mathias ^a   Kulkarni, Dhaval ^c   Tsukruk, Vladimir V ^c  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; COST REDUCTION; ELECTRON BEAMS; ELECTRONS; GRAPHENE DEVICES; IMPURITIES; NANOELECTRONICS; TIME DOMAIN ANALYSIS;

CARBON-BASED ELECTRONICS; ELECTRONICS MATERIALS; EMERGING APPLICATIONS; FOCUSED ELECTRON BEAMS; FUNCTIONAL NANO MATERIALS; INTERCONNECT STRUCTURES; PROCESSING ENVIRONMENTS; UNIQUE VALUE PROPOSITIONS;

GRAPHENE;

EID: 84911806514     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-014-8628-4     Document Type: Article

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