Analysis of electron beam induced deposition (EBID) of residual hydrocarbons in electron microscopy

Journal of Applied Physics

Volumn 101, Issue 5, 2007, Pages

  Rykaczewski, Konrad ^a   White, William B ^a   Fedorov, Andrei G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM INDUCED DEPOSITION (EBID); PEAK DISSOCIATION; SURFACE TRANSPORT EQUATION (STE);

ELECTRON MICROSCOPY; ELECTRON SCATTERING; ELECTRON TRANSITIONS; ELECTRONIC DENSITY OF STATES; HYDROCARBONS; MORPHOLOGY;

ELECTRON BEAMS;

EID: 33947305605     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2437065     Document Type: Article

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