Thermally induced transformations of amorphous carbon nanostructures fabricated by electron beam induced deposition

ACS Applied Materials and Interfaces

Volumn 3, Issue 3, 2011, Pages 710-720

  Kulkarni, Dhaval D ^a   Rykaczewski, Konrad ^a   Singamaneni, Srikanth ^a   Kim, Songkil ^a   Fedorov, Andrei G ^a   Tsukruk, Vladimir V ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

amorphous and nanocrystalline carbon; electron beam induced deposition; graphitization

Indexed keywords

BASIC SHAPES; CARBON DEPOSITES; CARBON NANOSTRUCTURES; CONFOCAL RAMAN MICROSCOPY; ELECTRON-BEAM-INDUCED DEPOSITION; ELECTRONIC DEVICE; HIGH RESOLUTION; INTERNAL MICROSTRUCTURE; METAL INTERCONNECTS; MULTISTAGE TRANSFORMATION; NANO SCALE; NANOCRYSTALLINE CARBON; NANOCRYSTALLINES; PHASE TRANSFORMATION; THERMAL-ANNEALING; THERMALLY INDUCED;

ATOMIC FORCE MICROSCOPY; DEPOSITS; ELECTRON BEAMS; ELECTRONS; GRAPHITE; GRAPHITIZATION; HIGH RESOLUTION ELECTRON MICROSCOPY; NANOSTRUCTURES; PHASE TRANSITIONS;

AMORPHOUS CARBON;

CARBON; NANOMATERIAL;

ARTICLE; CHEMISTRY; CONFORMATION; CRYSTALLIZATION; ELECTRON; ELECTROPLATING INDUSTRY; HEAT; MACROMOLECULE; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; PARTICLE SIZE; RADIATION EXPOSURE; SURFACE PROPERTY; ULTRASTRUCTURE;

CARBON; CRYSTALLIZATION; ELECTRONS; ELECTROPLATING; HOT TEMPERATURE; MACROMOLECULAR SUBSTANCES; MATERIALS TESTING; MOLECULAR CONFORMATION; NANOSTRUCTURES; NANOTECHNOLOGY; PARTICLE SIZE; SURFACE PROPERTIES;

EID: 79955947210     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am1010173     Document Type: Article

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