Inert gas jets for growth control in electron beam induced deposition

Applied Physics Letters

Volumn 98, Issue 26, 2011, Pages

  Henry, M R ^a   Kim, S ^a   Rykaczewski, K ^a   Fedorov, A G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM-INDUCED DEPOSITION; GROWTH CONTROL; PHYSICAL MECHANISM;

ARGON; DEPOSITION RATES; DESORPTION; ELECTRON BEAMS; ELECTRON OPTICS;

PLASMA DEPOSITION;

EID: 79960089812     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3605588     Document Type: Article

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