The effect of the geometry and material properties of a carbon joint produced by electron beam induced deposition on the electrical resistance of a multiwalled carbon nanotube-to-metal contact interface

Nanotechnology

Volumn 21, Issue 3, 2010, Pages

  Rykaczewski, Konrad ^a   Henry, Matthew R ^a   Kim, Song Kil ^a   Fedorov, Andrei G ^a   Kulkarni, Dhaval ^b,c   Singamaneni, Srikanth ^b,c   Tsukruk, Vladimir V ^b,c  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Georgia Institute of Technology   (United States)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

A-CARBON; CONDUCTIVE FORCE MICROSCOPY; DEPOSITED MATERIALS; DEPOSITION TIME; ELECTRICAL CONTACT RESISTANCE; ELECTRICAL RESISTANCES; ELECTRON BEAM ENERGY; ELECTRON BEAM-INDUCED DEPOSITION; ELECTRONIC DEVICE; JOINT GEOMETRY; LIMITING FACTORS; MATERIAL PROPERTY; MECHANICAL CHARACTERISTICS; METAL CONTACTS; METAL ELECTRODES; MODEL ANALYSIS; MULTI-WALL CARBON NANOTUBES; PROCESS PARAMETERS; RELATIVE IMPORTANCE;

AMORPHOUS CARBON; CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; COMPUTATIONAL GEOMETRY; CONTACT RESISTANCE; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CONTACTS; ELECTRIC PROPERTIES; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS;

MULTIWALLED CARBON NANOTUBES (MWCN);

EID: 74949114828     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/3/035202     Document Type: Article

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