Dynamic growth of carbon nanopillars and microrings in electron beam induced dissociation of residual hydrocarbons

Ultramicroscopy

Volumn 108, Issue 9, 2008, Pages 989-992

  Rykaczewski, Konrad ^a   Marshall, Andrew ^a   White, William B ^a   Fedorov, Andrei G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electron beam induced deposition; Microring and pillar deposit; Modeling; Residual hydrocarbons

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; CARBON FILMS; DEPOSITS; DISSOCIATION; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRON GUNS; ELECTRONS; HYDROCARBONS; MICROSCOPIC EXAMINATION; ORGANIC COMPOUNDS; PARTICLE BEAMS; SCANNING PROBE MICROSCOPY; TELEMETERING SYSTEMS; THICK FILMS; THREE DIMENSIONAL; VAPOR DEPOSITION;

AMORPHOUS CARBON THIN FILMS; ATOMIC FORCE (AF); CARBON-NANOPILLARS; COMPLEX SHAPES; CONTAMINATION PROBLEMS; DEPOSITION EXPERIMENTS; DYNAMIC GROWTH; ELECTRON BEAM CURRENTS; ELECTRON BEAM ENERGIES; ELSEVIER (CO); INDUCED DISSOCIATION; MICRO-RINGS; NANO PILLARS; NANO-MANUFACTURING; NON-LINEAR DYNAMICS; SI(1 0 0 ); THREE-DIMENSIONAL (3D) STRUCTURING; TRANSIENT EVOLUTION;

AMORPHOUS CARBON;

CARBON; HYDROCARBON;

ARTICLE; ATOMIC FORCE MICROSCOPY; DISSOCIATION CONSTANT; ELECTRON BEAM; IMAGING SYSTEM; NANOFABRICATION; SIMULATION; THREE DIMENSIONAL IMAGING;

CARBON; DEPOSITION; DISSOCIATION; DIVERSIFICATION; DYNAMICS; ELECTRON BEAMS; ELECTRON MICROSCOPY; ELECTRONS; GROWTH; HYDROCARBONS; LITHOGRAPHY; MICROSTRUCTURE; ORGANIC COMPOUNDS; SIMULATION; THIN FILMS; VAPORS;

EID: 48149105989     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2008.04.006     Document Type: Article

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