메뉴 건너뛰기




Volumn 239, Issue 3-4, 2005, Pages 273-278

Calculation of the surface binding energy for ion sputtered particles

Author keywords

Electronegativity; Energy; Ion sputtering; Sublimation energy

Indexed keywords

AMORPHIZATION; COMPUTATIONAL GEOMETRY; CONTAMINATION; ION BOMBARDMENT; MATHEMATICAL MODELS; MATRIX ALGEBRA; RARE EARTH ELEMENTS; SEMICONDUCTOR MATERIALS; SUBLIMATION;

EID: 10644285568     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.06.014     Document Type: Article
Times cited : (146)

References (19)
  • 1
    • 0003127705 scopus 로고
    • Angular, energy, and mass distribution of sputtered particles
    • R. Behrisch, K. Wittmaack (Eds.), Springer-Verlag
    • W.O. Hofer, Angular, energy, and mass distribution of sputtered particles, in: R. Behrisch, K. Wittmaack (Eds.), Sputtering by Particle Bombardment III, Topics in Applied Physics, vol. 64, Springer-Verlag, 1991.
    • (1991) Sputtering by Particle Bombardment III, Topics in Applied Physics , vol.64
    • Hofer, W.O.1
  • 9
    • 10644253104 scopus 로고
    • Elektronnaia Tekhnika
    • Polyprovodnikovye priboru, Seriya, in Russian
    • V.V. Yudin, Elektronnaia Tekhnika, Electonic Technique, Series: Semiconductor Devices, Polyprovodnikovye priboru, Seriya, 1982, pp. 3-15 (in Russian).
    • (1982) Series: Semiconductor Devices , pp. 3-15
    • Yudin, V.V.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.