Spatial and temporal investigation of high power pulsed magnetron discharges by optical 2D-imaging

Thin Solid Films

Volumn 519, Issue 5, 2010, Pages 1699-1704

  Liebig, B ^a   Braithwaite, N St J ^b   Kelly, P J ^c   Bradley, J W ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b OPEN UNIVERSITY   (United Kingdom)

^c MANCHESTER METROPOLITAN UNIVERSITY   (United Kingdom)

Author keywords

High power impulse magnetron sputtering; HIPIMS; Magnetron sputtering; Optical emission spectroscopy; Optical imaging; Plasma diagnostics

Indexed keywords

ABEL INVERSION; ARGON ATMOSPHERES; AVERAGE POWER; DISCHARGE CURRENTS; HIGH POWER IMPULSE MAGNETRON SPUTTERING; HIGH POWER PULSED MAGNETRON DISCHARGE; HIPIMS; INTENSITY PROFILES; IONISATION; METAL FLUXES; OPTICAL EMISSIONS; OPTICAL IMAGING; PEAK CURRENTS; PLASMA-INDUCED; TARGET MATERIALS; TEMPORAL EVOLUTION; TITANIUM TARGETS; WAVELENGTH FILTERS; WORKING GAS; ZINC IONS;

ACOUSTICS; ARGON; DC POWER TRANSMISSION; DIAMOND FILMS; ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; IONS; LIGHT EMISSION; MAGNETRON SPUTTERING; OPTICAL IMAGE STORAGE; PLASMA DIAGNOSTICS; PLASMA WAVES; TITANIUM; ZINC;

OPTICAL EMISSION SPECTROSCOPY;

EID: 78649752556     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.06.055     Document Type: Conference Paper

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