SCOPUS 정보 검색 플랫폼

Plasma Sources Science and Technology

Volumn 13, Issue 4, 2004, Pages 654-661

Measurement of the magnetic field change in a pulsed high current magnetron discharge

(6) Bohlmark, Johan a Helmersson, Ulf a VanZeeland, Michael b Axnas I c Alami, Jones a Brenning, Nils c

a LINKÖPING UNIVERSITY (Sweden)

b UNIVERSITY OF CALIFORNIA (United States)

c ROYAL INSTITUTE OF TECHNOLOGY (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; ELECTRIC DISCHARGES; LANGMUIR BLODGETT FILMS; MAGNETIC FIELD EFFECTS; PERTURBATION TECHNIQUES; PHOTOIONIZATION; PLASMA DENSITY; VELOCITY MEASUREMENT;

CLASSICAL DIFFUSION; ELECTRON DRIFT; MAGNETIC WAVES; PLASMA ELECTRONS;

MAGNETRON SPUTTERING;

EID: 9944227286 PISSN: 09630252 EISSN: None Source Type: Journal
DOI: 10.1088/0963-0252/13/4/014 Document Type: Article

Times cited : (70)

References (15)

1
- 36449002062
- Rossnagel S M and Hopwood J 1993 Appl. Phys. Lett. 63 3285
- (1993) Appl. Phys. Lett. , vol.63 , pp. 3285
- Rossnagel, S.M.¹ Hopwood, J.²

2
- 0034318373
- Christou C and Barber Z H 2000 J. Vac. Sci. Technol. A 18 2897
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2897
- Christou, C.¹ Barber, Z.H.²

3
- 0034215825
- Macak K, Kouznetsov V, Schneider J M, Helmersson U and Petrov I 2000 J. Vac. Sci. Technol. A 18 1533
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 1533
- Macak, K.¹ Kouznetsov, V.² Schneider, J.M.³ Helmersson, U.⁴ Petrov, I.⁵

4
- 0000975178
- Kouznetsov V, Macak K, Schneider J M, Helmersson U and Petrov I 1999 Surf. Coat. Technol. 122 290
- (1999) Surf. Coat. Technol. , vol.122 , pp. 290
- Kouznetsov, V.¹ Macak, K.² Schneider, J.M.³ Helmersson, U.⁴ Petrov, I.⁵

5
- 0037010581
- Gudmundsson J T, Alami J and Helmersson U 2002 Surf. Coat. Technol. 161 249
- (2002) Surf. Coat. Technol. , vol.161 , pp. 249
- Gudmundsson, J.T.¹ Alami, J.² Helmersson, U.³

6
- 0037472626
- Ehiasarian A P, Munz W D, Hultman L, Helmersson U and Petrov I 2003 Surf. Coat. Technol. 163-164 267
- (2003) Surf. Coat. Technol. , vol.163-164 , pp. 267
- Ehiasarian, A.P.¹ Munz, W.D.² Hultman, L.³ Helmersson, U.⁴ Petrov, I.⁵

7
- 9944230744
- DeKoven B M 2003 Soc. Vac. Coaters 505/856 7188
- (2003) Soc. Vac. Coaters , vol.505 , Issue.856 , pp. 7188
- DeKoven, B.M.¹

8
- 0031097250
- Zlatanovic M, Belosevac R and Kunosic A 1997 Surf. Coat. Technol. 90 143
- (1997) Surf. Coat. Technol. , vol.90 , pp. 143
- Zlatanovic, M.¹ Belosevac, R.² Kunosic, A.³

9
- 0025560001
- Axnäs I 1990 Adv. Space Res. 10 17
- (1990) Adv. Space Res. , vol.10 , pp. 17
- Axnäs, I.¹

10
- 0003427863
- (London: Plenum) chapters 1-2
- Chen F 1984 Introduction to Plasma Physics and Controlled Fusion (London: Plenum) chapters 1-2
- (1984) Introduction to Plasma Physics and Controlled Fusion
- Chen, F.¹

11
- 0035418525
- Bradley J W, Thompson S and Aranda Gonzalvo Y 2001 Plasma Sources Sci. Technol. 10 490
- (2001) Plasma Sources Sci. Technol. , vol.10 , pp. 490
- Bradley, J.W.¹ Thompson, S.² Aranda Gonzalvo, Y.³

12
- 0003957289
- (New York: Cambridge University Press) chapter 2
- Hutchinson I H 2002 Principles of Plasma Diagnostics (New York: Cambridge University Press) chapter 2
- (2002) Principles of Plasma Diagnostics
- Hutchinson, I.H.¹

13
- 9944221807
- Mozgrin D V, Fetisov I K and Khodashenko G V 1995 Plasma Phys. Rep. 21 400
- (1995) Plasma Phys. Rep. , vol.21 , pp. 400
- Mozgrin, D.V.¹ Fetisov, I.K.² Khodashenko, G.V.³

14
- 0001038540
- Guimaraes F and Bretagne J 1993 Plasma Sources Sci. Technol. 2 127
- (1993) Plasma Sources Sci. Technol. , vol.2 , pp. 127
- Guimaraes, F.¹ Bretagne, J.²

15
- 84955046502
- Rossnagel S M and Kaufman H M 1987 J. Vac. Sci. Technol. A 5 88
- (1987) J. Vac. Sci. Technol. A , vol.5 , pp. 88
- Rossnagel, S.M.¹ Kaufman, H.M.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.