Review of feedforward approaches for nano precision positioning in high speed SPM operation

IFAC Proceedings Volumes (IFAC-PapersOnline)

Volumn 17, Issue 1 PART 1, 2008, Pages

  Devasia, Santosh ^a  

^a NONE

Author keywords

Mechatronic systems

Indexed keywords

ENABLING TOOLS; FEED-FORWARD; MECHATRONIC SYSTEMS; NANO SCALE; OPERATING SPEED; PRECISION POSITIONING; RESEARCH GOALS; SCANNING PROBE MICROSCOPE;

FEEDFORWARD CONTROL;

MECHATRONICS;

EID: 79961018711     PISSN: 14746670     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.3182/20080706-5-KR-1001.2629     Document Type: Conference Paper

References (79)

1. G. Binnig and H. Rohrer. Scanning tunneling microscopy. Helvetica Physica Acta, 55:726-735, 1982.
2. G. Binnig, C. F. Quate, and C. Gerber. Atomic force microscope. Phys. Rev. Lett., 56(9):930-933, March, 1986.
3. L. Pao. A comparison of control architectures for atomic force microscopes. Keynote paper, Invited Session on Dynamics and Control of Micro- and Nanoscale systems-I, IFAC World Congress, 2008.
4. M. V. Salapaka. Systems and control approaches to nano-interrogation: Unraveling new temporal and spatial regimes. Keynote paper, Invited Session on Dynamics and Control of Micro- and Nanoscale systems-III, IFAC World Congress, 2008.
5. S. Devasia, E. Eleftheriou, and R. Moheimani. A survey of control issues in nanopositioning. IEEE Transactions on Control Systems Technology, 15(5):802-823, Sept, 2007.
6. R. Wiesendanger, editor. Scanning Probe Microscopy and Spectroscopy. Cambridge University Press, 1994.
7. S. Alexander, L. Hellemans, O. Marti, J. Schneir, V. Elings, P. K. Hansma,M. Longmire, and J. Gurley. An atomic-resolution atomic-force microscope implemented using an optical lever. Journal of Applied Physics, 65(1):164-167, 1989.
8. M. Gentili, C. Giovannella, and S. Selci, editors. Nanolithography: A Borderland between STM, EB, IB and X-Ray Lithographies, volume NATO ASI Series E: Applied Science Vol. 264. Kluwer Academic Publishers, 1993.
9. R. C. Barrett and C. F. Quate. High-speed, largescale imaging with the atomic force microscope. J. of Vacuum Science Technology B., 9(2):302-306, 1991.
10. P. Avouris, T. Hertel, and R. Martel. Atomic force microscope tip-induced local oxidation of silicon: kinetics, mechanism, and nanofabrication. Appl. Phys. Lett., 71:285, 1997.
11. E. Dubois and J. L. Bubendorff. Kinetics of scanned probe oxidation: Space-charge limited growth. Journal of Applied Physics, 87(11):8148-8154, June 2000.
12. R. Pearce and G. J. Vancso. Real-time imaging of melting and crystallization in poly(ethylene oxide) by atomic force microscopy. Polymer, 39(5):1237-1242, March 1998.
13. L. Li, C.-M. Chan, K. L. Yeung, J.-X. Li, K.-M. Ng, and Yuguo Lei. Direct observation of growth of lamellae and spherulites of a semicrystalline polymer by afm. Macromolecules, 34(2):316-325, 2001.
14. L. G. M. Beekmans, D. W. van der Meer, and G. J. Vancso. Crystal melting and its kinetics on poly(ethylene oxide) by in situ atomic force microscopy. Polymer, 43(6):1887-1895, March 2002.
15. S. V. Kalinin and D. A. Bonnell. Effect of phase transition on the surface potential of the bati03. Journal of Appl. Phys., 87(8):3950-3957, 2000.
16. E Evans and K Ritchie. Dynamic strength of molecular adhesion bonds. Biophysical Journal, 72(4):1541-1555, April, 1997.
17. B. C. Stipe, M. A. Rezaei, andW. Ho. Single-molecule vibrational spectroscopy. Science, 280:1732-1735, 12 June 1998.
18. K. Wilder, H. T. Soh, A. Atalar, and C. F. Quate. Nanometer-scale patterning and individual current controlled lithography using multiple scanning probes. Review of Scientific Instruments, 70:2822-2827, 1999.
19. S. C. Minne, G. Yaraliuglu, S. R. Manalis, J. D. Adams, J. Zesch, A. Atalar, and C. F. Quate. Automated parallel high-speed atomic force microscopy. Applied Physics Letters, 72(18):2240-2342, 1998.
20. A. L. D. Lozanne, W. F. Smith, and E. E. Ehrichs. Direct writing with a combined stm/sem system. Proceedings of NATO advanced Workshop on Nano-lithography: A Borderland between STM, EB, IB, and X-ray Lithographies, NATO ASI Series E, Applied Science Vol264:159-174, 1993.
21. J. Aizenberg, A.J. Black, and G.M. Whitesides. Control of crystal nucleation by patterned self-assembled monolayers. Nature, 398:495-498, 1999.
22. D. C. Coffey and D. S. Ginger. Patterning phase separation in polymer films with dip-pen nanolithography. J. Am. Chem. Soc., 127:4564, 2005.
23. S. W. Chung, D. S. Ginger, M. Morales, Z. Zhang, V. Chandrasekhar, M. A. Ratner, and C. A. Mirkin. Top-down meets bottom-up: Dip-pen nanolithography and dna-directed assembly of nanoscale electrical circuits. Small, 1:64, 2005.
24. Cheolmin Park, Jongseung Yoon, and Edwin L. Thomas. Enabling nanotechnology with self assembled block copolymer patterns. Polymer, 44(22):6725-6760, Oct. 2003.
25. Z. Shao, J. Mou, D. M. Czajkowsky, J. Yang, and JY Yuan. Biological atomic force microscopy: What is achieved and what is needed. Advances in Physics, 45(1):1-86, 1996. (Pubitemid 126516884)
26. R. C. Barrett and C. F. Quate. Optical scancorrection system applied to atomic force microscopy. Rev. Sci. Instrum., 62(6):1393-1399, June, 1991.
27. A. Sebastian and S.M. Salapaka. Design methodologies for robust nano-positioning. IEEE Transactions on Control Systems Technology, 13(6):868-876, Nov. 2005.
28. N. Tamer and M. A. Dahleh. Feedback control of piezoelectric tube scanners. Proceedings of Control and Decision Conference, Lake Buena Vista, Florida, pages 1826-1831, 1994.
29. A. Daniele, S. Salapaka, M.V. Salapaka, and M. Dahleh. Piezoelectric scanners for atomic force microscopes: Design of lateral sensors, indentification and control. In Proceedings of the American Control Conference, pages 253-257, San Diego, CA, June 1999.
30. G. Schitter, P. Menold, H. F. Knapp, F. Allgower, and A. Stemmer. High performance feedback for fast scanning atomic force microscopy. Rev. Sci. Instrum., 72(8):3320-3327, 2001.
31. S. Salapaka, A. Sebastian, J. P. Cleveland, and M. V. Salapaka. High bandwidth nano-positioner: A robust control approach. Review of Scientific Instruments, 73(9):3232-3241, Sept., 2002.
32. R. Koops and G. A. Sawatzky. New scanning device for scanning tunneling microscope applications. Rev. Sci. Instrum., 63(8):4008-4009, August, 1992.
33. T. Sulchek, R. Hsieh, J. D. Adams, S. C. Minne, C. F. Quate, and D. M. Adderton. High-speed atomic force microscopy in liquid. Rev. of Scientific Instruments, 71(5):2097-2099, May 2000.
34. T. Ando, N. Kodera, E. Takai, D. Maruyama, K. Saito, and A. Toda. A high-speed atomic force microscope for studying biological macromolecules. Proceedings of the National Academy of Sciences of the USA, 98(22):12468-12472, Oct., 2001.
35. S. John, T. van Noort, K. O. van der Werf, B. G. de Grooth, and J. Greve. High speed atomic force microscopy of biomolecules by image tracking. Biophysical Journal, 77:2295-2303, Oct., 1990.
36. D. Croft and S. Devasia. Vibration compensation for high speed scanning tunneling microscopy. AIP Rev. Sci. Instrum., 70(12):4600-4605, Dec, 1999.
37. S. Devasia. Should model-based inverse inputs be used as feedforward under plant uncertainty? IEEE Trans. on Automatic Control, 47(11):1865-1871,Nov, 2002.
38. E. Bayo. A finite-element approach to control the end-point motion of a single-link flexible robot. J. of Robotic Systems, 4(1):63-75, 1987.
39. S. Devasia, D. Chen, and B. Paden. Nonlinear inversion-based output tracking. IEEE Transactions on Automatic Control, 41(7):930-943, 1996.
40. J.S. Dewey, K. Leang, and S. Devasia. Experimental and theoretical results in output- trajectory redesign for flexible structures. ASME Journal of Dynamic Systems, Measurement, and Control, 120(4):456-461, December, 1998.
41. R. Brinkerhoff and S. Devasia. Output tracking for actuator deficient/redundant systems: Multiple piezoactuator example. AIAA J. of Guidance, Control, and Dynamics, 23(2):370-373, March-April 2000.
42. Y. Zhao and S. Jayasuriya. Feedforward controllers and tracking accuracy in the presence of plant uncertainties. ASME Journal of Dynamic Systems, Measurement, and Control, 117:490-495, December,1995.
43. D. Croft, S. Stilson, and S. Devasia. Optimal tracking of piezo-based nano-positioners. J. of Nanotechnology, 10:201-208, June 1999.
44. Q. Zou, K. K. Leang, E. Sadoun, M. J. Reed, and S. Devasia. Control issues in high-speed afm for biological applications: Collagen imaging example. Special Issue on Advances in Nano-technology Control, Asian Journal Control, 6(2):164-178, June 2004.
45. K. K. Leang and S. Devasia. Feedback-linearized inverse feedforward for creep, hysteresis, and vibration compensation in afm piezoactuators. IEEE Transactions on Control Systems Technology, 15(5):927-935, September, 2007.
46. Yang Li and John Bechhoefer. Feedforward control of a closed-loop piezoelectric translation stage for atomic force microscope. Review of Scientific Instruments, 78, 013702:1-8, January, 2007.
47. D. Croft and S. Devasia. Hysteresis and vibration compensation for piezo actuators. AIAA Journal of Guidance, Control and Dynamics, 21(5):710-717, September-October, 1998.
48. D. Croft, G. Shedd, and S. Devasia. Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application. ASME Journal of Dynamic Systems, Measurement and Control, 123(35):35-43, March, 2001.
49. Y. Okazaki. A micro-positioning tool post using a piezoelectric actuator for diamond turning machines. Precision Engineering, 12:151-156, July 1990.
50. K. Leang and S. Devasia. Hysteresis, creep, and vibration compensation for piezoactuators: Feedback and feedforward control. Proceedings of 2nd IFAC Conference on Mechatronic Systems, Berkeley, CA, pages 283-289, Dec 9-11, 2002.
51. G. M. Clayton, S. Tien, A. J. Fleming, S. O. R. Moheimani, and S. Devasia. Inverse feedforward of charge controlled piezopositioners. Accepted to Mechatronics, To Appear, 2007.
52. K. K. Leang and S. Devasia. Design of hysteresis compensating iterative learning control: Application to atomic force microscopes. Mechatronics, 16(3-4):141-158, April-May, 2006.
53. Ying Wu and Qingze Zou. Iterative control approach to compensate for both the hysteresis and the dynamics effects of piezo actuators. IEEE Transactions on Control Systems Technology, 15(5):936-944, September, 2007.
54. T. Tsao and M. Tomizuka. Adaptive zero phase error tracking algorithm for digital control. ASME Journal of Dynamic Systems, Measurement, and Control, 109(2):349-354, December, 1987.
55. J. Ghosh and B. Paden. A pseudo-inverse based iterative learning control. IEEE Trans. on Automatic Control, 47(5):831-837, May,2002.
56. G. Schitter, R. W. Stark, and A. Stemmer. Fast contact-mode atomic force microscopy on biological specimen by model-based control. ULTRAMICROSCOPY, 100(3-4):253-257, Aug, 2004.
57. S. Tien, Q. Zou, and S. Devasia. Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed afm operation. IEEE Transactions on Control Systems Technology, 13(6):921-931, Nov 2005.
58. G. M. Clayton and S. Devasia. Iterative imagebased modeling and control for higher scanning probe microscope performance. Review of Scientific Instruments, 78(8):Article No.083704 (pp. 1-12, August 29, 2007.
59. P. P. Lehenkari, G. T. Charras, A. Nykanen, and M. A. Horton. Adapting atomic force microscopy for cell biology. Ultramicroscopy, 82:289-295, 2000. (Pubitemid 30070113)
60. V C Abraham, V Krishnamurthi, D L Taylor, and F Lanni. The actin-based nanomachine at the leading edge of migrating cells. Biophysical Journal, 77(3):1721-1732, Sept., 1999.
61. J. V. Small, T. Stradal, E. Vignal, and K. Rottner. The lamellipodium: where motility begins. Trends in Cell Biology, 12(3):112-120, March, 2002.
62. M B Viani, L I Pietrasanta, J B Thompson, A Chand, I C Gebeshuber, J H Kindt, M Richter, H G Hansma, and P K Hansma. Probing protein-protein interactions in real time. Nature Structural Biology, 7(8):644-647, 2000.
63. T. Uchihashi, T. Ando, and H. Yamashita. Fast phase imaging in liquids using a rapid scan atomic force microscope. Applied Physics Letters, 89(213112):1-3, November, 2006.
64. H. Dong, M. Wanyun, L. Fulong, Y. Meiling, O. Zhigang, and S. Yunxu. Time-series observation of the spreading out of microvessel endothelial cells with atomic force microscopy. Physics in Medicine and Biology, 48:3897-3909, 2003.
65. T. Ushiki, S. Yamamoto, J. Hitomi, S. Ogura, T. Umemoto, and M. Shigeno. Atomic force microscopy of living cells. Japanese Journal of Applied Physics, 39(6B):3761-3764, June, 2000.
66. M. B. Viani, T. E. Sch affer, G. T. Paloczi, L. I. Pietrasanta, B. L. Smith, J. B. Thompson, M. Rief, H. E. Gaub, K. W. Plaxco, A. N. Cleland, H. G. Hansma, and P. K. Hansma. Fast imaging and fast force spectroscopy of single biopolymers with a new atomic force microscope designed for small cantilever. Review of Scientific Instruments, 70(11):4300-4303, 1999.
67. Y. Jiao and T. E. Schaffer. Accurate height and volume measurements on soft samples with the atomic force microscope. Langmuir, 20:10038-10045, 2004.
68. V. M. D. Cupere, J. V. Wetter, and P. G. Rouxhet. Nanoscale organization of collagen and mixed collagen-pluronic adsorbed layers. Langmuir, 19:6957-6967, 2003.
69. G. Schitter, K. J. strm, B. E. DeMartini, P. J. Thurner, K. L. Turner, and P. K. Hansma. Design and modeling of a high-speed afm-scanner. IEEE Transactions on Control Systems Technology, 15(5):906-915, September, 2007.
70. Y. Ando, T. Ikehara, and S. Matsumoto. Development of three-dimensional microstages using inclined deep-reactive ion etching. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,, 16(3):748-751, June, 2007.
71. Q. Zou and S. Devasia. Preview-based stableinversion for output tracking. ASME J. of Dynamic Systems, Measurement and Control, 121(4):625-630, Dec, 1999.
72. Q. Zou and S. Devasia. Preview-based optimal inversion for output tracking: Application to scanning tunneling microscopy. IEEE Transactions on Control Systems Technology, 12(3):375-386, May, 2004.
73. G. Schitter, F. Allg ower, and A. Stemmer. A new control strategy for high-speed atomic force microscopy. Nanotechnology, 15:108-114, 2004.
74. Szuchi Tien. High-speed nano-precision positioning: Theory and application to afm imaging of soft samples. Ph.D Thesis, U. of Washington, Seattle, July 2007.
75. Szuchi Tienand S. Devasia. Afm imaging of large soft samples in liquid medium using iterative inverse feedforward control. American Control Conference, Submitted in 2007.
76. G. Clayton and S. Devasia. Image-based control of dynamic effects in scanning tunneling microscopes. Nanotechnology, 16(6):809-818, June 2005.
77. R. V. Lapshin. Automatic lateral calibration of tunneling microscope scanners. Review of Scientific Instruments, 69(9):3268-3276, Sept., 1998.
78. R. V. Lapshin. Automatic drift elimination in probe microscope images based on techniques of counter-scanning and topography feature recognition. Measurement Science and Technology, 18(3):907-927, March, 2007.
79. S. Hutchinson, G. Hager, and P. Corke. A tutorial on visual servo control. IEEE Trans. Robotics Automation, 12:651-670, Oct. 1996.