Automatic drift elimination in probe microscope images based on techniques of counter-scanning and topography feature recognition

Measurement Science and Technology

Volumn 18, Issue 3, 2007, Pages 907-927

  Lapshin, Rostislav V ^a  

^a KAPITZA INSTITUTE FOR PHYSICAL PROBLEMS   (Russian Federation)

Author keywords

AFM; Calibration; Counter scanned images; Counter scanning; Creep; CSI; Feature oriented scanning; FOS; HOPG; Manipulator; Nanotechnology; Porous alumina; Recognition; Scanner; SPM; STM; Thermal drift; Topography feature

Indexed keywords

ALUMINA; ATOMIC FORCE MICROSCOPY; CALIBRATION; CREEP; MANIPULATORS; POROUS MATERIALS; SCANNING PROBE MICROSCOPY;

COUNTER-SCANNING; FEATURE-ORIENTED SCANNING (FOS); THERMAL DRIFT; TOPOGRAPHY FEATURE;

SURFACE TOPOGRAPHY;

ALUMINA; ATOMIC FORCE MICROSCOPY; CALIBRATION; CREEP; MANIPULATORS; POROUS MATERIALS; SCANNING PROBE MICROSCOPY; SURFACE TOPOGRAPHY;

EID: 34247199930     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/3/046     Document Type: Article

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