Ion-induced nanoscale ripple patterns on Si surfaces: Theory and experiment

Materials

Volumn 3, Issue 10, 2010, Pages 4811-4841

  Keller, Adrian ^a,b   Facsko, Stefan ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b AARHUS UNIVERSITY   (Denmark)

Author keywords

Continuum theory; Ion sputtering; Nanopatterning; Surface morphology

Indexed keywords

CONTINUUM THEORY; FUNCTIONAL SURFACES; ION SPUTTERING; MORPHOLOGY DEVELOPMENT; NANOPATTERNED SUBSTRATES; NANOPATTERNING; PATTERN FORMATION; RIPPLE PATTERNS;

CONTINUUM MECHANICS; ION BOMBARDMENT; NANOTECHNOLOGY; SUBSTRATES; SURFACE MORPHOLOGY;

SILICON;

EID: 79960184408     PISSN: None     EISSN: 19961944     Source Type: Journal    
DOI: 10.3390/ma3104811     Document Type: Article

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