Highly ordered self-organized dot patterns on Si surfaces by low-energy ion-beam erosion

Applied Physics Letters

Volumn 87, Issue 3, 2005, Pages

  Ziberi, B ^a   Frost, F ^a   Rauschenbach, B ^a   Hoche Th ^a,b  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b 3D Micromac AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY (HRTEM); ION BEAM EROSION; ION ENERGIES; TOPOGRAPHY;

ATOMIC FORCE MICROSCOPY; HIGH RESOLUTION ELECTRON MICROSCOPY; ION BEAMS; NANOSTRUCTURED MATERIALS; ROTATION; TOPOLOGY;

SILICON;

EID: 24144448989     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2000342     Document Type: Article

References (15)

1. M. V. R. Murty, Surf. Sci. 500, 523 (2002).
2. E. Chason and M. J. Aziz, Scr. Mater. 49, 953 (2003).
3. U. Valbusa, C. Boragno, and F. J. Buatier de Mongeot, J. Phys.: Condens. Matter 14, 8153 (2002).
4. S. Facsko, T. Dekorsy, C. Koerdt, C. Trappe, H. Kurz, A. Vogt, and H. L. Hartnagel, Science 285, 1551 (1999).
5. F. Frost, A. Schindler, and F. Bigl, Phys. Rev. Lett. 85, 4116 (2000).
6. F. Frost, B. Ziberi, T. Höche, and B. Rauschenbach, Nucl. Instrum. Methods Phys. Res. B 216, 9 (2004).
7. R. Gago, L. Vázquez, R. Cuerno, M. Varela, C. Ballesteros, and J. M. Albella, Appl. Phys. Lett. 78, 3316 (2001).
8. A. Cuenat and M. J. Aziz, Mater. Res. Soc. Symp. Proc. 696, N2.8 (2002).
9. F. Ludwig, C. R. Eddy, O. Malis, and R. L. Headrick, Appl. Phys. Lett. 81, 2770 (2002).
10. M. Zeuner, J. Meichsner, H. Neumann, F. Scholze, and F. Bigl, J. Appl. Phys. 80, 611 (1996).
11. M. Tartz, E. Hartmann, F. Scholze, and H. Neumann, Rev. Sci. Instrum. 69, 1147 (1998).
12. Y. Zhao, G.-C. Wang, and T.-M. Lu, Characterization of Amorphous and Crystalline Rough Surfaces: Principles and Applications (Academia, San Diego, 2001).
13. F. Frost, R. Fechner, B. Ziberi, D. Flamm, and A. Schindler, Thin Solid Films 459, 100 (2004).
14. B. Ziberi, F. Frost, M. Tartz, H. Neumann, and B. Rauschenbach, Thin Solid Films 459, 106 (2004).
15. S. Facsko (private communication).