Tuning the surface morphology in self-organized ion beam nanopatterning of Si(001) via metal incorporation: From holes to dots

Nanotechnology

Volumn 19, Issue 35, 2008, Pages

  Sanchez Garcia J A ^a   Vazquez L ^a   Gago, R ^a,b   Redondo Cubero, A ^b   Albella, J M ^a   Czigany Zs ^c  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^b CENTRO DE MICROANÁLISIS DE MATERIALES   (Spain)

^c RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; ION BEAMS; ION BOMBARDMENT; METALS; NANOSTRUCTURED MATERIALS; SPUTTERING;

ION BEAM NANO-PATTERNING; ION-BEAM SPUTTERING; METAL INCORPORATION; NANO HOLES; NANODOT PATTERNS; SELECTIVE PRODUCTION; SELF-ORGANIZED; SI SURFACES; SI(001);

SILICON;

METAL; NANOMATERIAL; QUANTUM DOT; SILICON;

ARTICLE; MATERIALS TESTING; MORPHOLOGY; NANOCHEMISTRY; PRIORITY JOURNAL; SPECTROMETRY; SURFACE PROPERTY;

EID: 48249110346     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/35/355306     Document Type: Article

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