Novel piezoelectric actuation mechanism for a gimbal-less mirror in 2D raster scanning applications

Journal of Micromechanics and Microengineering

Volumn 21, Issue 7, 2011, Pages

  Koh, Kah How ^a   Kobayashi, Takeshi ^b   Xie, Jin ^c   Yu, Aibin ^d   Lee, Chengkuo ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c INSTITUTE OF MICROELECTRONICS   (Singapore)

^d MICRON TECHNOLOGY INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

2D SCANNING; AC VOLTAGE; BENDING MODES; BULK SILICON MICROMACHINING; CANTILEVER ACTUATORS; CANTILEVER ARRAYS; ELECTRODE MATERIAL; MEASUREMENT RESULTS; MIXED MODE; MIXED-MODE OPERATIONS; OPTICAL DEFLECTION ANGLE; PB(ZR , TI)O; PIEZOELECTRIC ACTUATION; PZT; RASTER SCANNING; RELEASE PROCESS; SI DEVICES; SILICON BEAMS; SILICON MIRRORS; SILICON-ON-INSULATOR SUBSTRATES; TORSIONAL MODES;

COMPOSITE MICROMECHANICS; LEAD; MICROMACHINING; MIRRORS; NANOCANTILEVERS; NATURAL FREQUENCIES; PIEZOELECTRICITY; SCANNING; ZIRCONIUM;

PIEZOELECTRIC ACTUATORS;

EID: 79960050077     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/7/075001     Document Type: Article

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