Thermally driven torsional micromirrors using pre-bent torsion bar for large static angular displacement

Journal of Micromechanics and Microengineering

Volumn 19, Issue 4, 2009, Pages

  Eun, Youngkee ^a   Kim, Jongbaeg ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR DISPLACEMENT; ANGULAR MOTIONS; DEVICE LAYERS; DIRECTION OF ROTATION; IN-PLANE; MICRO MIRROR; OPERATIONAL VOLTAGE; SCAN ANGLE; SILICON ON INSULATOR WAFERS; THERMAL ACTUATOR; THERMALLY DRIVEN; THICK LAYERS; THIN LAYERS; TORSION BAR; TORSIONAL MICROMIRRORS; TRANSLATIONAL MOTIONS; TWO-DEGREE-OF-FREEDOM;

ACTUATORS; ELECTRIC POTENTIAL; LIGHT TRANSMISSION; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SURFACE MICROMACHINING;

TORSIONAL STRESS;

EID: 68849086659     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/4/045009     Document Type: Article

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