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Volumn 123-124, Issue , 2005, Pages 563-569

A new latched 2 × 2 optical switch using bi-directional movable electrothermal H-beam actuators

Author keywords

Electrothermal actuator; H beam; Optical switch

Indexed keywords

CROSSTALK; MIRRORS; OPTICAL SWITCHES;

EID: 24944573847     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.04.033     Document Type: Conference Paper
Times cited : (36)

References (16)
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    • (1996) J. Micromech. Microeng. , vol.6 , pp. 34-137
    • Lerch, P.1    Slimane, C.K.2    Romanowicz, B.3    Renaud, P.4
  • 2
    • 0030705026 scopus 로고    scopus 로고
    • Applications for surface-micromachined polysilicon thermal actuators and arrays
    • J.H. Comtois, and V.M. Bright Applications for surface-micromachined polysilicon thermal actuators and arrays Sens. Actuator A 58 1997 19 25
    • (1997) Sens. Actuator A , vol.58 , pp. 19-25
    • Comtois, J.H.1    Bright, V.M.2
  • 3
    • 0031095336 scopus 로고    scopus 로고
    • An electro-thermally and laterally driven polysilicon microactuators
    • C.S. Pan, and W. Hsu An electro-thermally and laterally driven polysilicon microactuators J. Micromech. Microeng. 7 1997 7 13
    • (1997) J. Micromech. Microeng. , vol.7 , pp. 7-13
    • Pan, C.S.1    Hsu, W.2
  • 9
    • 12344260555 scopus 로고    scopus 로고
    • Study of electrothermal V-beam actuators and latched mechanism for optical switch
    • C. Lee, and C.-Y. Wu Study of electrothermal V-beam actuators and latched mechanism for optical switch J. Micromech. Microeng. 15 2005 11 19
    • (2005) J. Micromech. Microeng. , vol.15 , pp. 11-19
    • Lee, C.1    Wu, C.-Y.2
  • 11
    • 0036645839 scopus 로고    scopus 로고
    • Bulk silicon micromachining for MEMS in optical communication systems
    • M. Hoffmann, and E. Voges Bulk silicon micromachining for MEMS in optical communication systems J. Micromech. Microeng. 12 2002 349 360
    • (2002) J. Micromech. Microeng. , vol.12 , pp. 349-360
    • Hoffmann, M.1    Voges, E.2
  • 12
    • 0042863272 scopus 로고    scopus 로고
    • Development and application of lateral comb drive actuator
    • C. Chen, C. Lee, Y.-J. Lai, and W.-C. Chen Development and application of lateral comb drive actuator Jpn. J. Appl. Phys. Part 1 42 6B 2003 4059 4062
    • (2003) Jpn. J. Appl. Phys. Part 1 , vol.42 , Issue.6 , pp. 4059-4062
    • Chen, C.1    Lee, C.2    Lai, Y.-J.3    Chen, W.-C.4
  • 13
    • 0032162919 scopus 로고    scopus 로고
    • An analysis of a compressed bistable buckled beam
    • M. Vangbo An analysis of a compressed bistable buckled beam Sens. Actuator A 69 1998 212 216
    • (1998) Sens. Actuator A , vol.69 , pp. 212-216
    • Vangbo, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.