Study of electrothermal V-beam actuators and latched mechanism for optical switch

Journal of Micromechanics and Microengineering

Volumn 15, Issue 1, 2005, Pages 11-19

  Lee, Chengkuo ^a   Wu, Chia Yu ^a  

^a ASIA PACIFIC MICROSYSTEMS INC   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC CURRENTS; ELECTROMECHANICAL DEVICES; FABRICATION; INTERFACES (MATERIALS); LIGHT POLARIZATION; MASKS; REFLECTION; SIGNAL PROCESSING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

DEEP REACTION ION ETCHING (DRIE); POLARIZATION-DEPENDENT LOSS (PDL); SILION-ON-INSULATOR (SOI) WAFERS; V-BEAM ACTUATOR;

OPTICAL SWITCHES;

EID: 12344260555     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/1/003     Document Type: Article

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