Low-Voltage Driven MEMS VOA Using Torsional Attenuation Mechanism Based on Piezoelectric Beam Actuators

IEEE Photonics Technology Letters

Volumn 22, Issue 18, 2010, Pages 1355-1357

  Koh, Kah How ^a   Lee, Chengkuo ^a   Kobayashi, Takeshi ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Microelectromechanical Systems (MEMS); mirror; optical MEMS; Pb(Zr, Ti)O3(PZT); piezoelectric Actuator; variable optical attenuator (VOA)

Indexed keywords

EID: 85008020259     PISSN: 10411135     EISSN: 19410174     Source Type: Journal    
DOI: 10.1109/LPT.2010.2056679     Document Type: Article

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