Surface- and bulk- micromachined two-dimensional scanner driven by angular vertical comb actuators

Journal of Microelectromechanical Systems

Volumn 14, Issue 6, 2005, Pages 1329-1338

  Piyawattanametha, Wibool ^a,b,c   Patterson, Pamela R ^a,d   Hah, Dooyoung ^a,e   Toshiyoshi, Hiroshi ^f   Wu, Ming C ^a,e  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

^c STANFORD UNIVERSITY   (United States)

^d Hughes Aircraft Co   (United States)

^e UNIVERSITY OF CALIFORNIA   (United States)

^f INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Angular vertical comb (AVC) actuators; Confocal microscopy two dimensional (2 D) scanner; Electrostatic force actuators; Laser beam steering; Micromirror; Optical coherence tomograhy (OCT); Scanner

Indexed keywords

ELECTROSTATIC ACTUATORS; LASER BEAM EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; OPTICAL DESIGN; OPTICAL SYSTEMS; REACTIVE ION ETCHING; SCANNING; SILICON ON INSULATOR TECHNOLOGY; TOMOGRAPHY;

ANGULAR VERTICAL COMB ACTUATORS; CONFOCAL MICROSCOPY TWO-DIMENSIONAL SCANNER; DEEP REACTIVE ION ETCHING (DRIE); LASER BEAM STEERING; MECHANICAL SCANNING; MICROMIRROR; OPTICAL COHERENCE TOMOGRAPHY (OCT); OPTICAL SCANNER;

MICROACTUATORS;

EID: 29244488753     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.859073     Document Type: Article

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