High-speed metal-based optical microscanners using stainless-steel substrate and piezoelectric thick films prepared by aerosol deposition method

Sensors and Actuators, A: Physical

Volumn 135, Issue 1, 2007, Pages 86-91

  Park, Jae Hyuk ^a   Akedo, Jun ^a   Sato, Harumichi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Aerosol deposition method; Lamb wave; Microscanner; PZT; Stainless steel

Indexed keywords

DEPOSITION; NATURAL FREQUENCIES; OPTICAL SYSTEMS; STAINLESS STEEL; SURFACE WAVES; THICK FILMS;

AEROSOL DEPOSITION METHOD; LAMB WAVE; MICROSCANNER; PZT; SCANNING ANGLES; VACUUM PACKAGING;

MICROSYSTEMS;

EID: 33947224662     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.11.027     Document Type: Article

References (6)

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3. Akedo J., and Lebedev M. Piezoelectric properties and poling effect of Pb(Zr, Ti)O3 thick films prepared for microactuators by aerosol deposition. Appl. Phys. Lett. 77 (2000) 1710-1712
4. 3 thick films formed by aerosol deposition method. J. Cryst. Growth 235 (2002) 415-420
5. Park J., Akedo J., Sato H., and Lebedev M. Practical high-speed metal-based optical microscanning devices with low production cost. Proceeding of MEMS2006 (2006) 730-733
6. 3 thick films formed by aerosol deposition. Jan. J. Appl. Phys. 44 (2005) 7072-7077