NiFe plated biaxial MEMS scanner for 2-D imaging

IEEE Photonics Technology Letters

Volumn 19, Issue 5, 2007, Pages 330-332

  Yalcinkaya, Arda D ^a   Urey, Hakan ^b   Holmstrom, Sven ^b  

^a BOGAZICI UNIVERSITY   (Turkey)

^b KOÇ UNIVERSITY   (Turkey)

Author keywords

Displays; Electromagnetic actuator; Microelectromechanical systems (MEMS); Microsystems; Microtechnology

Indexed keywords

MAGNETIC FLUX; MAGNETOSTATICS; MICROACTUATORS; MICROSYSTEMS; MIRRORS; NICKEL COMPOUNDS; SCANNING;

ELECTROMAGNETIC ACTUATOR; MEMS SCANNER; MICROMIRROR; MICROTECHNOLOGY;

MEMS;

EID: 33947694373     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2007.891592     Document Type: Article

References (14)

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