A two axes scanning SOI MEMS micromirror for endoscopic bioimaging

Journal of Micromechanics and Microengineering

Volumn 18, Issue 2, 2008, Pages

  Singh, J ^a   Teo, J H S ^a   Xu, Y ^a,b   Premachandran, C S ^a   Chen, N ^b   Kotlanka, R ^a   Olivo, M ^c   Sheppard, C J R ^b  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^c DIVISION OF MEDICAL ONCOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MIRRORS; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

FLEXURAL SPRINGS; MIRROR PLATES; THERMAL ACTUATORS;

MEMS;

EID: 42549143899     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/2/025001     Document Type: Article

References (29)

1. Petersen K E 1980 Silicon torsional scanning mirror IBM J. Res. Dev. 24 631
2. Hornbeck L J and Nelson W E 1988 Bistable deformable mirror device OSA Tech. Digest Series, Spatial Light Modulators and Applications III vol 8 (Washington, DC: Optical Society of America) p 107
3. Kessel P F V, Hornbeck L J, Meier R E and Douglass M R 1988 A MEMS-based project display Proc. IEEE 86 1687
4. Toshiyishi H and Fujita H 1996 Electrostatic micro torsion mirrors for an optical switch matrix J. Microelectromech. Syst. 5 231
5. Judy J W and Muller R S 1997 Magnetically actuated addressable microstructures J. Microelectromech. Syst. 6 249
6. Muller R S and Lau K Y 1998 Surface micromachined microoptical elements and systems Proc. IEEE 86 1705
7. Juan W H and Pang S W 1998 High aspect ratio Si vertical micromirror array for optical switching J. Microelectromech. Syst. 7 207
8. Ford J E, Aksyuk V A, Bishop D J and Walker J A 1999 Wavelength add-drop switching using tilting micromirrors J. Lightw. Technol. 17 904
9. Marxer C and de Rooij N F 1999 Micro-opto-mechanical 2 × 2 switch for single mode fiber based on plasma-etched silicon mirror and electrostatic actuation J. Lightw. Technol. 17 2
10. Hagelin P M, Krishnamoorthy U, Heritage J P and Solgaard O 2000 IEEE Photon. Technol. Lett. 12 882
11. Lin L Y, Goldstein E L and Tkach R W 2000 On expandability of Free-space micromachined optical cross connects J. Lightw. Technol. 18 482
12. Tearney G J, Bresinski M E, Bouma B E, Boppart S A, Pitris C, Southern J F and Fujimoto J G 1997 In vivo endoscopic optical biopsy coherence tomography Science 276 2037
13. Okano Y and Hirabayashi Y 2002 Magnetically actuated micromirror and measurement system for motion characteristics using specular reflection IEEE J. Sel. Top. Quantum Electron. 8 19
14. Singh J, Gan T, Agarwal A, Soundarapandian M and Liw S 2005 3D free space thermally actuated micromirror device Sensors Actuators A 123-124 468
15. Bouma B E and Tearney G J 2002 Clinical imaging with optical coherence tomography Acad. Radiol. 9 942
16. D'amico A V, Weinstein M, Li X, Richie J P and Fujimoto J 2000 Optical coherence tomography as a method for identifying benign and malignant microscopic structures in prostate gland Urology 55 783
17. Rector D M, Rogers R F and George J S 1999 A focusing image for assessing neural activity in vivo J. Neurosci. 91 135
18. Boppart S A, Herrmann J, Pitris C, Stamper D L, Brezinski M E and Fujimoto J G 1999 High resolution optical coherence tomography guided laser ablation of surgical tissue J. Surg. Res. 82 275
19. Fujimoto J G 2001 Optical coherence tomography Appl. Phys. t.2 1099
20. Yaqoob Z, Wu J, Mcdowell E J, Heng X and Yang C 2006 Methods and application areas of endoscopic optical coherence tomography J. Biomed. Opt. 11 063001
21. Xie T, Guo S, Chen Z, Mukai D and Brenner M 2006 GRIN lens rod based probe for endoscopic spectral coherence tomography with fast dynamic focus tracking Opt. Exp. 14 3238
22. Yeow J T W, Yang V X D, Chahwan A, Gordon M L, Qi B, Vitkin I A, Wilson B C and Goldenberg A A 2005 Micromachined 2-D scanner for 3-D optical coherence tomography Sensors Actuators A 117 331
23. Bernstein J J, Lee T W, Rogomentich F J, Bancu M G, Kim K H, Maguluri G, Bouma B E and Deboer J F 2007 Scanning OCT endoscope with 2 axis magnetic micromirror Endoscopic Microscopic II; Proc. SPIE 6432 64320L
24. Singh J, Hoe C C, Jason T H S, Chen N, Premachandran C S, Sheppard C J and Olivo M 2007 Optical coherent tomography (OCT) bio-imaging using 3D scanning micromirror Endoscopic Microscopic II; Proc. SPIE 6432 64320C
25. Papageorgas P G, Maroulis D, Anagnostopoulos G, Albrecht H, Wagner B, Iakovidis D K A and Theofanous N G 2006 A high-performance imaging and control system for a micromirror-based laser-scanning endoscope device IEEE Trans. Instrum. Meas. 55 1725
26. Liu L and Chen N G 2006 Double-pass rotary mirror array for fast scanning optical delay line Appl. Opt. 45 5426-31
27. Jain A, Kopa A, Pan Y, Fedder G K and Xie H 2004 A two axis electrothermal micromirror for endoscopic optical coherence tomography IEEE J. Selected Topics in Quantum Electron. 10 636
28. Xie T, Xie H, Fedder G K and Pan Y 2003 Endoscopic optical coherence tomography with a modified Microelectromechanical systems mirror for detection of bladder cancers Appl. Opt. 42 6422
29. Timoshenko S 1925 Analysis of bi-metal thermostats J. Opt. Soc. Am. 11 233