Biosensing using Nanoelectromechanical Systems

Methods in Molecular Biology

Volumn 726, Issue , 2011, Pages 119-139

  Yeri, Ashish ^a   Gao, Di ^a  

^a University of Pittsburgh   (United States)

Author keywords

Biosensors; MEMS; Microelectromechanical systems; Microfabrication; Micromachining; Nanofabrication

Indexed keywords

DNA; PROTEIN;

ARTICLE; BACTERIUM; EQUIPMENT DESIGN; GENETIC PROCEDURES; INSTRUMENTATION; METABOLISM; METHODOLOGY; MICROELECTROMECHANICAL SYSTEM; NANOTECHNOLOGY; VIRUS;

BACTERIA; BIOSENSING TECHNIQUES; DNA; EQUIPMENT DESIGN; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; NANOTECHNOLOGY; PROTEINS; VIRUSES;

EID: 79959787654     PISSN: 10643745     EISSN: 19406029     Source Type: Book Series    
DOI: 10.1007/978-1-61779-052-2_9     Document Type: Chapter

References (50)

1. Waggoner, P. S. and Craighead, H. G. (2007) Micro-and nanomechanical sensors for environmental, chemical, and biological detection. Lab. Chip. 7, 1238-1255.
2. Hierold, C. (2004) From micro-to nanosystems: Mechanical sensors go nano. J. Micromech. Microeng. 14, S1-S11.
3. Carr, D. W. and Craighead, H. G. (1997) Fabrication of nanoelectromechanical systems in single crystal silicon using silicon on insulator substrates and electron beam lithography. J. Vac. Sci. Technol. B 15, 2760-2763.
4. Verbridge, S. S., Parpia, J. M., Reichenbach, R. B., Bellan, L. M., and Craighead, H. G. (2006) High quality factor resonance at room temperature with nanostrings under high tensile stress. J. Appl. Phys. 99, 124304.
5. Kameoka, J., Verbridge, S. S., Liu, H., Czaplewski, D. A., and Craighead, H. G. (2004) Fabrication of suspended silica glass nanofibers from polymeric materials using a scanned electrospinning source. Nano Lett. 4, 2105-2108.
6. Czaplewski, D. A., Verbridge, S. S., Kameoka, J., and Craighead, H. G. (2004) Nanomechanical oscillators fabricated using polymeric nanofiber templates. Nano Lett. 4, 437-439.
7. Wu, Y., Cui, Y., Huynh, L., Barrelet, C. J., Bell, D. C., and Lieber, C. M. (2004) Controlled growth and structures of molecular-scale silicon nanowires. Nano Lett. 4, 433-436.
8. Lange, D., Hagleitner, C., Hierlemann, A., Brand, O., and Baltes, H. (2002) Complementary metal oxide semiconductor cantilever arrays on a single chip: Mass-sensitive detection of volatile organic compounds. Anal. Chem. 74, 3084-3095.
9. He, R., Feng, X. L., Roukes, M. L., and Yang, P. (2008) Self-transducing silicon nanowire electromechanical systems at room temperature. Nano Lett. 8, 1756-1761.
10. Cleland, A. N. and Roukes, M. L., (1996) Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals. Appl. Phys. Lett. 69, 2653-2655.
11. Ilic, B., Craighead, H. G., Krylov, S., Senaratne, W., Ober, C., and Neuzil, P. (2004) Attogram detection using nanoelectromechanical oscillators. J. Appl. Phys. 95, 3694-3703.
12. Ilic, B., Yang, Y., and Craighead, H. G. (2004) Virus detection using nanoelectromechanical devices. Appl. Phys. Lett. 85, 2604-2606.
13. Lee, J. H., Hwang, K. S., Park, J., Yoon, K. H., Yoon, D. S., and Kim, T. S. (2005) Immunoassay of prostate-specific antigen (psa) using resonant frequency shift of piezoelectric nanomechanical microcantilever. Biosens. Bioelectron. 20, 2157-2162.
14. Kwon, H., Han, K., Hwang, K., Lee, J., Kim, T., Yoon, D., et al. (2007) Development of a peptide inhibitor-based cantilever sensor assay for cyclic adenosine monophosphate-dependent protein kinase. Anal. Chim. Acta 585, 344-349.
15. Ekinci, K. L. (2005) Electromechanical transducers at the nanoscale: Actuation and sensing of motion in nanoelectromechanical systems (nems). Small 1, 786-797.
16. O'Shea, S. J., Lu, P., Shen, F., Neuzil, P., and Zhang, Q. X. (2005) Out-of-plane electrostatic actuation of microcantilevers. Nanotechnology 16, 602-608.
17. Ilic, B., Czaplewski, D., Zalalutdinov, M., and Craighead, H. G. (2001) Single cell detection with micromechanical oscillators. J. Vac. Sci. Technol. B 19, 2825-2828.
18. Ilic, B., Czaplewski, D., Craighead, H. G., Neuzil, P., Campagnolo, C., and Batt, C. (2000) Mechanical resonant immunospecific biological detector. Appl. Phys. Lett. 77, 450-452.
19. Lavrik, N. V. and Datskos, P. G. (2003) Femtogram mass detection using photothermally actuated nanomechanical resonators. Appl. Phys. Lett. 82, 2697-2699.
20. Carr, D. W. and Craighead, H. G. (1998) Measurement of nanomechanical resonant structures in single-crystal silicon. J. Vac. Sci. Technol. B 16, 3821-3824
21. Kouh, T., Karabacak, D., Kim, D. H., and Ekinci, K. L. (2005) Diffraction effects in optical interferometric displacement detection in nanoelectromechanical systems. Appl. Phys. Lett. 86, 013106.
22. Foresi, J. S., Black, M. R., Agarwal, A. M., and Kimerling, L. C. (1996) Losses in polycrystalline silicon waveguides. Appl. Phys. Lett. 68, 2052-2054.
23. Stoney, G. G. (1909) The tension of metallic films deposited by electrolysis. Proc. R. Soc. Ser. A 82,172-175.
24. Ramos, D., Tamayo, J., Mertens, J., Calleja, M., and Zaballos, A. (2006) Origin of the response of nanomechanical resonators to bacteria adsorption. J. Appl. Phys. 100, 106105.
25. Craighead, H. (2007) Nanomechanical systems: Measuring more than mass. Nat. Nanotechnol. 2, 18-19.
26. Gupta, A. K., Nair, P. R., Akin, D., Ladisch, M. R., Broyles, S., Alam, M. A., et al. (2006) Anomalous resonance in a nanomechanical biosensor. Proc. Natl. Acad. Sci. USA 103, 13362-13367.
27. Tamayo, J., Ramos, D., Mertens, J. and Calleja, M. (2006) Effect of the adsorbate stiffness on the resonance response of microcantilever sensors. Appl. Phys. Lett. 89, 224104.
28. Verbridge, S. S., Craighead, H. G., and Parpia, J. M. (2008) A megahertz nanomechanical resonator with room temperature quality factor over a million. Appl. Phys. Lett. 92, 013112.
29. Ekinci, K. L., Yang, Y. T., and Roukes, M. L. (2004) Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems. J. Appl. Phys. 95, 2682-2689.
30. Ekinci, K. L. and Roukes, M. L. (2005) Nanoelectromechanical systems. Rev. Sci. Instrum. 76, 061101.
31. Yasumura, K. Y., Stowe, T. D., Chow, E. M., Pfafman, T., Kenny, T. W., Stipe, B. C., et al. (2000) Quality factors in micron-and submicronthick cantilevers. J. Microelectromech. Syst. 9, 117-125.
32. Haucke, H., Liu, X., Vignola, J. F., Houston, B. H., Marcus, M. H., and Baldwin, J. W. (2005) Effects of annealing and temperature on acoustic dissipation in a micromechanical silicon oscillator. Appl. Phys. Lett. 86, 181903.
33. Yang, J., Ono, T., and Esashi, M. (2000) Surface effects and high quality factors in ultrathin single-crystal silicon cantilevers. Appl. Phys. Lett. 77, 3860-3862.
34. Wu, G., Datar, R. H., Hansen, K. M., Thundat, T., Cote, R. J., and Majumdar, A. (2001) Bioassay of prostate-specific antigen (psa) using microcantilevers. Nat. Biotechnol. 19, 856-860.
35. Majumdar, A. (2002) Bioassays based on molecular nanomechanics. Dis. Markers 18, 167-174.
36. Arntz, Y., Seelig, J. D., Lang, H. P., Zhang, J., Hunziker, P., Ramseyer, J. P., et al. (2003) Label-free protein assay based on a nanomechanical cantilever array. Nanotechnology 14, 86-90.
37. Wee, K. W., Kang, G. Y., Park, J., Kang, J. Y., Yoon, D. S., Park, J. H., et al. (2005) Novel electrical detection of label-free disease marker proteins using piezoresistive self-sensing micro-cantilevers. Biosens. Bioelectron. 20, 1932-1938.
38. Huber, F., Hegner, M., Gerber, C., Guntherodt, H., and Lang, H. (2006) Label free analysis of transcription factors using microcantilever arrays. Biosens. Bioelectron. 21, 1599-1605.
39. Fritz, J., Baller, M. K., Lang, H. P., Rothuizen, H., Vettiger, P., Meyer, E., et al. (2000) Translating biomolecular recognition into nanomechanics. Science 288, 316-318.
40. McKendry, R., Zhang, J., Arntz, Y., Strunz, T., Hegner, M., Lang, H. P., et al. (2002) Multiple label-free biodetection and quantitative dna-binding assays on a nanomechanical cantilever array. Proc. Natl. Acad. Sci. USA 99, 9783-9788.
41. Mukhopadhyay, R., Lorentzen, M., Kjems, J., and Besenbacher, F. (2005) Nanomechanical sensing of dna sequences using piezoresistive cantilevers. Langmuir 21, 8400-8408.
42. Hwang, K. S., Lee, J. H., Park, J., Yoon, D. S., Park, J. H., and Kim, T. S. (2004) In situ quantitative analysis of a prostate-specific antigen (psa) using a nanomechanical pzt cantilever. Lab Chip 4, 547-552.
43. Lee, J. (2004) Label free novel electrical detection using micromachined pzt monolithic thin film cantilever for the detection of c-reactive protein. Biosens. Bioelectron. 20, 269-275.
44. Burg, T. P. and Manalis, S. R. (2003) Suspended microchannel resonators for biomolecular detection. Appl. Phys. Lett. 83, 2698-2700.
45. Burg, T. P., Godin, M., Knudsen, S. M., Shen, W., Carlson, G., Foster, J. S., et al. (2007) Weighing of biomolecules, single cells and single nanoparticles in fluid. Nature 446, 1066-1069.
46. Ilic, B., Yang, Y., Aubin, K., Reichenbach, R., Krylov, S., and Craighead, H. G. (2005) Enumeration of dna molecules bound to a nanomechanical oscillator. Nano Lett. 5, 925-929.
47. Gupta, A., Akin, D., and Bashir, R. (2004) Single virus particle mass detection using microresonators with nanoscale thickness. Appl. Phys. Lett. 84, 1976-1978.
48. Johnson, L., Gupta, A. K., Ghafoor, A., Akin, D., and Bashir, R. (2006). Characterization of vaccinia virus particles using microscale silicon cantilever resonators and atomic force microscopy. Sens. Actuators, B 115, 189-197.
49. Sandberg, R., Mølhave, K., Boisen, A., and Svendsen, W. (2005) Effect of gold coating on the q-factor of a resonant cantilever. J. Micromech. Microeng. 15, 2249-2253.
50. Dohn, S. R., Sandberg, R., Svendsen, W., and Boisen, A. (2005) Enhanced functionality of cantilever based mass sensors using higher modes. Appl. Phys. Lett. 86, 233501.