Electromechanical transducers at the nanoscale: Actuation and sensing of motion in nanoelectromechanical systems (NEMS)

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Volumn 1, Issue 8-9, 2005, Pages 786-797

  Ekinci, K L ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

Actuators; Nanoelectromechanical systems (NEMS); Nanotechnology sensors

Indexed keywords

ACTUATORS; BANDWIDTH; ERROR DETECTION; NANOSTRUCTURED MATERIALS; ROBUSTNESS (CONTROL SYSTEMS); SENSORS; TRANSISTORS;

ELECTROMECHANICAL TRANSDUCERS; FUNDAMENTAL PHYSICS; NANOELECTROMECHANICAL SYSTEMS (NEMS); NANOTECHNOLOGY SENSORS;

MICROELECTROMECHANICAL DEVICES;

CHEMISTRY; ELECTROMAGNETIC FIELD; ELECTRONICS; EQUIPMENT DESIGN; GENETIC PROCEDURES; INSTRUMENTATION; MECHANICS; MOTION; MOVEMENT (PHYSIOLOGY); NANOTECHNOLOGY; REVIEW; SCANNING ELECTRON MICROSCOPY; SENSITIVITY AND SPECIFICITY; TRANSDUCER;

BIOSENSING TECHNIQUES; ELECTROMAGNETIC FIELDS; ELECTRONICS; EQUIPMENT DESIGN; MECHANICS; MICROCHEMISTRY; MICROSCOPY, ELECTRON, SCANNING; MINIATURIZATION; MOTION; MOVEMENT; NANOTECHNOLOGY; SENSITIVITY AND SPECIFICITY; TRANSDUCERS;

EID: 33744782177     PISSN: 16136810     EISSN: 16136829     Source Type: Journal    
DOI: 10.1002/smll.200500077     Document Type: Review

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