Losses in polycrystalline silicon waveguides

Applied Physics Letters

Volumn 68, Issue 15, 1996, Pages 2052-2054

  Foresi, J S ^a   Black, M R ^a   Agarwal, A M ^a   Kimerling, L C ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALCULATIONS; CHEMICAL POLISHING; LIGHT SCATTERING; MICROSTRUCTURE; OPTICAL VARIABLES MEASUREMENT; POLYCRYSTALLINE MATERIALS; REFLECTOMETERS; SEMICONDUCTING SILICON; SILICA; SURFACE ROUGHNESS;

BOND AND ETCHBACK SILICON ON INSULATOR MATERIALS; CHEMICAL MECHANICAL POLISHING; CUTBACK TECHNIQUES; SPECULAR REFLECTANCE; WAVEGUIDE LOSSES;

WAVEGUIDES;

EID: 0030575001     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116300     Document Type: Article

References (21)

1. R. A. Soref and J. P. Lorenzo, IEEE J. Quantum Electron. QE-22, 873 (1986).
2. B. N. Kurdi and D. G. Hall, Opt. Lett. 13, 175 (1987).
3. B. L. Weiss, G. T. Reed, S. K. Toh, R. A. Soref, and F. Namavar, IEEE Photonics Technol. Lett. 3, 19 (1991).
4. J. Schmidtchen, A. Splett, B. Schuppert, and K. Petermann, Electron. Lett. 27, 1486 (1991).
5. R. M. Emmons, B. N. Kudi, and D. G. Hall, IEEE J. Quantum Electron. 28, 157 (1992).
6. A. Rickman, G. T. Reed, B. L. Weiss, and F. Namavar, IEEE Photonics Technol. Lett. 4, 633 (1992).
7. R. A. Soref, E. Cortesi, F. Namavar, and L. Friedman, IEEE Photonics Technol. Lett. 3, 22 (1991).
8. Y, Kokbun, T. Baba, and T. Sakaki, Electron. Lett. 22, 892 (1986).
9. R. Adar, Y. Shani, C. H. Henry, R. C. Kistler, G. E. Bonder, and N. A. Olsson, Appl. Phys. Lett. 58, 444 (1991).
10. S. Asakawa, Y. Kokubun, M. Ohyama, and T. Baba, Electron. Lett. 29, 1485 (1993).
11. D. Lim, M.S. thesis, Massachusetts Institute of Technology (1994).
12. W. B. Jackson, N. M. Johnson, and D. K. Biegelsen, Appl. Phys. Lett. 43, 195 (1983).
13. R. E. Jones, Jr. and S. P. Wesolowski, J. Appl. Phys. 56, 1701 (1984).
14. L. S. Yu, F. Guan, Q. Z. Liu, and S. S. Lau, Appl. Phys. Lett. 66, 2016 (1995).
15. K. Bernhard-Hofer, A. Zrenner, J. Brunner, and G. Abstreiter, Appl. Phys. Lett. 66, 2226 (1995).
16. J. Benedict, R. Anderson, and S. J. Klepeis, Mater. Res. Soc. Symp. Proc. 254, 121 (1992).
17. K. L. Chiang, C. J. Dell'Oca, and F. N. Schwettmann, J. Electrochem. Soc. 126, 2261 (1979).
18. P. K. Tien, Appl. Opt. 10, 2395 (1971).
19. H. Kogelnik, in Guided-Wave Optoelectronics, edited by T. Tamir (Springer, New York, 1988).
20. R. G. Hunsperger, Integrated Optics: Theory and Technology (Springer, New York 1985).
21. B. L. Weiss and G. T. Reed, Opt. Quantum Electron. 23, 1061 (1991).