Diffraction effects in optical interferometric displacement detection in nanoelectromechanical systems

Applied Physics Letters

Volumn 86, Issue 1, 2005, Pages

  Kouh, T ^a   Karabacak, D ^a   Kim, D H ^a,b   Ekinci, K L ^a  

^a BOSTON UNIVERSITY   (United States)

^b Seoul National University of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; MATHEMATICAL MODELS; NANOTECHNOLOGY; NUMERICAL ANALYSIS; PHOTODETECTORS; SENSITIVITY ANALYSIS;

MICHELSON INTERFEROMETRY; NANOELECTROMECHANICAL SYSTEMS (NEMS); OPTICAL CAVITIES; OPTICAL INTERFEROMETRIC DISPLACEMENT DETECTION;

INTERFEROMETRY;

EID: 19744383454     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1843289     Document Type: Article

References (13)

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