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Volumn 14, Issue 9, 2004, Pages

From micro- to nanosystems: Mechanical sensors go nano

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; COSTS; FABRICATION; FIELD EMISSION DISPLAYS; PARAMETER ESTIMATION; RELIABILITY; SIGNAL DETECTION; SIGNAL TO NOISE RATIO; SIMULATION; SURFACE PROPERTIES; TRANSDUCERS; VIRTUAL REALITY;

EID: 4544231378     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/9/001     Document Type: Conference Paper
Times cited : (92)

References (77)
  • 1
    • 0037235377 scopus 로고    scopus 로고
    • The nanodrive project
    • Jan.
    • Vettiger P and Binnig G 2003 The nanodrive project Sci. Am. Jan. 46-53
    • (2003) Sci. Am. , pp. 46-53
    • Vettiger, P.1    Binnig, G.2
  • 2
    • 0037360868 scopus 로고    scopus 로고
    • Millipede - A MEMS-based scanning-probe data-storage system
    • Eleftheriou E et al 2003 Millipede - a MEMS-based scanning-probe data-storage system IEEE Trans. Magn. 39 938-45
    • (2003) IEEE Trans. Magn. , vol.39 , pp. 938-945
    • Eleftheriou, E.1
  • 3
    • 20144384406 scopus 로고    scopus 로고
    • The 'Millipede' - Nanotechnology entering data storage
    • Vettiger P et al 2002 The 'Millipede' - nanotechnology entering data storage IEEE Trans. Nanotechnol. 139-55
    • (2002) IEEE Trans. Nanotechnol. , vol.1 , pp. 39-55
    • Vettiger, P.1
  • 8
    • 0034206445 scopus 로고    scopus 로고
    • MEMS: Quo vadis in century XXI?
    • Muller R S 2000 MEMS: Quo Vadis in Century XXI? Microelectron. Eng. 53 47-54
    • (2000) Microelectron. Eng. , vol.53 , pp. 47-54
    • Muller, R.S.1
  • 10
    • 0032138470 scopus 로고    scopus 로고
    • Surface micromachining for microelectromechanical systems
    • Bustillo J M, Howe R T and Muller R S 1998 Surface micromachining for microelectromechanical systems Proc. IEEE 86 1552-74
    • (1998) Proc. IEEE , vol.86 , pp. 1552-1574
    • Bustillo, J.M.1    Howe, R.T.2    Muller, R.S.3
  • 11
    • 0032136277 scopus 로고    scopus 로고
    • Surface-micromachined microoptical elements and systems
    • Muller R S and Lau K Y 1998 Surface-micromachined microoptical elements and systems Proc. IEEE 86 1705-20
    • (1998) Proc. IEEE , vol.86 , pp. 1705-1720
    • Muller, R.S.1    Lau, K.Y.2
  • 12
    • 0032141012 scopus 로고    scopus 로고
    • CAD challenges for microsensors, microactuators, and microsystems
    • Senturia S D 1998 CAD challenges for microsensors, microactuators, and microsystems Proc. IEEE 86 1611-26
    • (1998) Proc. IEEE , vol.86 , pp. 1611-1626
    • Senturia, S.D.1
  • 15
    • 0032666029 scopus 로고    scopus 로고
    • A digital light processingTM update-status and future applications
    • Hornbeck L-J 1999 A digital light processingTM update-status and future applications Proc. SPIE-Int. Soc. Opt. Eng. 3634 158-70
    • (1999) Proc. SPIE-int. Soc. Opt. Eng. , vol.3634 , pp. 158-170
    • Hornbeck, L.-J.1
  • 16
    • 0031649731 scopus 로고    scopus 로고
    • Lifetime estimates and unique failure mechanisms of the digital micromirror device (DMD)
    • Douglas M R 1998 Lifetime estimates and unique failure mechanisms of the digital micromirror device (DMD) Proc. IEEE 36th Annual Int. Reliability Physics Symp. pp 9-16
    • (1998) Proc. IEEE 36th Annual Int. Reliability Physics Symp. , pp. 9-16
    • Douglas, M.R.1
  • 18
    • 0036913170 scopus 로고    scopus 로고
    • Single-chip surface micromachined integrated gyroscope with 50/h Allan deviation
    • Geen J A, Sherman S J, Chang J F and Lewis S R 2002 Single-chip surface micromachined integrated gyroscope with 50/h Allan deviation IEEE J. Solid State Circuits 37 1860-6
    • (2002) IEEE J. Solid State Circuits , vol.37 , pp. 1860-1866
    • Geen, J.A.1    Sherman, S.J.2    Chang, J.F.3    Lewis, S.R.4
  • 21
    • 0041732714 scopus 로고    scopus 로고
    • Fully-sealed, high-brightness carbon-nanotube field-emission display
    • Choi W B et al 1999 Fully-sealed, high-brightness carbon-nanotube field-emission display Appl. Phys. Lett. 75 3129
    • (1999) Appl. Phys. Lett. , vol.75 , pp. 3129
    • Choi, W.B.1
  • 23
    • 4544280052 scopus 로고    scopus 로고
    • Carbon-nanotube based field-emission displays for large area and color applications J
    • Choi W B et al 2000 Carbon-nanotube based field-emission displays for large area and color applications J. Inform. Display 1 59-62
    • (2000) Inform. Display , vol.1 , pp. 59-62
    • Choi, W.B.1
  • 25
    • 0012034851 scopus 로고    scopus 로고
    • Current status of field-emission displays
    • Itoh S and Tanaka M 2002 Current status of field-emission displays Proc. IEEE 90 514-20
    • (2002) Proc. IEEE , vol.90 , pp. 514-520
    • Itoh, S.1    Tanaka, M.2
  • 33
    • 0025452546 scopus 로고
    • A proposal for electrically levitating micromotors
    • Kumar S, Cho D and Carr W N 1990 A proposal for electrically levitating micromotors Sensors Actuators A 24 141-9
    • (1990) Sensors Actuators A , vol.24 , pp. 141-149
    • Kumar, S.1    Cho, D.2    Carr, W.N.3
  • 34
    • 0038779676 scopus 로고    scopus 로고
    • Electronic interface design for an electrically floating micro-disc
    • Gindila M V and Kraft M 2003 Electronic interface design for an electrically floating micro-disc J. Micromech. Microeng. 13 11-6
    • (2003) J. Micromech. Microeng. , vol.13 , pp. 11-16
    • Gindila, M.V.1    Kraft, M.2
  • 36
    • 0038346810 scopus 로고    scopus 로고
    • Electrostatically levitated ring-shaped rotational-gyro/acclerometer Japan
    • Murakoshi T, Endo Y, Fukatsu K, Nakamura S and Esashi M 2003 Electrostatically levitated ring-shaped rotational-gyro/acclerometer Japan. J. Appl. Phys. 42 2468-72
    • (2003) J. Appl. Phys. , vol.42 , pp. 2468-2472
    • Murakoshi, T.1    Endo, Y.2    Fukatsu, K.3    Nakamura, S.4    Esashi, M.5
  • 39
    • 0028526888 scopus 로고
    • A surface micromachined silicon accelerometer with on-chip detection circuitry
    • Kuehnel W and Sherman S 1994 A surface micromachined silicon accelerometer with on-chip detection circuitry Sensors Actuators A 45 7-16
    • (1994) Sensors Actuators A , vol.45 , pp. 7-16
    • Kuehnel, W.1    Sherman, S.2
  • 40
    • 0032163636 scopus 로고    scopus 로고
    • Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products
    • Chau K H L and Sulouff R E 1998 Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products Microelectron. J. 29 579-86
    • (1998) Microelectron. J. , vol.29 , pp. 579-586
    • Chau, K.H.L.1    Sulouff, R.E.2
  • 41
    • 84860088553 scopus 로고    scopus 로고
    • Analog devices introduces world's first integrated gyroscope
    • Wisniowski H 2002 Analog Devices introduces world's first integrated gyroscope Analog Devices Press Releases
    • (2002) Analog Devices Press Releases
    • Wisniowski, H.1
  • 42
    • 0031649731 scopus 로고    scopus 로고
    • Lifetime estimates and unique failure mechanisms of the digital micromirror device (DMD)
    • Douglas M R 1998 Lifetime estimates and unique failure mechanisms of the digital micromirror device (DMD) Proc. IEEE 36th Ann. Int. Reliability Physics Symp. 1998 pp 9-16
    • (1998) Proc. IEEE 36th Ann. Int. Reliability Physics Symp. 1998 , pp. 9-16
    • Douglas, M.R.1
  • 43
    • 0036887933 scopus 로고    scopus 로고
    • Mechanical behavior of 30-50 nm thick aluminum films under uniaxial tension
    • Haque M A and Saif M T A 2003 Mechanical behavior of 30-50 nm thick aluminum films under uniaxial tension Scr. Mater. 47 pp 863-7
    • (2003) Scr. Mater. , vol.47 , pp. 863-867
    • Haque, M.A.1    Saif, M.T.A.2
  • 44
    • 0141925281 scopus 로고    scopus 로고
    • A review of MEMS-based microscale and nanoscale tensile and bending testing
    • Haque M A and Saif M T A 2003 A review of MEMS-based microscale and nanoscale tensile and bending testing Exp. Mech. 43 248-55
    • (2003) Exp. Mech. , vol.43 , pp. 248-255
    • Haque, M.A.1    Saif, M.T.A.2
  • 46
    • 0032026436 scopus 로고    scopus 로고
    • Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films
    • Tsuchiya T, Tabata O, Sakata J and Taga Y 1998 Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films IEEE-JMEMS 7 106-13
    • (1998) IEEE-JMEMS , vol.7 , pp. 106-113
    • Tsuchiya, T.1    Tabata, O.2    Sakata, J.3    Taga, Y.4
  • 47
  • 48
    • 0032484754 scopus 로고    scopus 로고
    • Manipulation of individual carbon nanotubes and their interaction with surfaces
    • Hertel T, Martel R and Avouris P 1998 Manipulation of individual carbon nanotubes and their interaction with surfaces J. Phys. Chem. B 102 910-5
    • (1998) J. Phys. Chem. B , vol.102 , pp. 910-915
    • Hertel, T.1    Martel, R.2    Avouris, P.3
  • 51
    • 0001310712 scopus 로고    scopus 로고
    • Electrical and mechanical properties of distorted carbon nanotubes
    • Rochefort A, Avouris P, Lesage F and Salahub D R 1999 Electrical and mechanical properties of distorted carbon nanotubes Phys. Rev. B 60 13824-30
    • (1999) Phys. Rev. B , vol.60 , pp. 13824-13830
    • Rochefort, A.1    Avouris, P.2    Lesage, F.3    Salahub, D.R.4
  • 53
    • 0034723247 scopus 로고    scopus 로고
    • Strength and breaking mechanism of multiwalled carbon nanotubes under tensile load
    • Yu M, Lourie O, Dyer M J, Moloni K, Kelly T F and Ruoff R S 2000 Strength and breaking mechanism of multiwalled carbon nanotubes under tensile load Science 287 637-40
    • (2000) Science , vol.287 , pp. 637-640
    • Yu, M.1    Lourie, O.2    Dyer, M.J.3    Moloni, K.4    Kelly, T.F.5    Ruoff, R.S.6
  • 58
    • 79956038268 scopus 로고    scopus 로고
    • Simple method to prepare individual suspended nanofibers
    • Kim G-T, Gu G, Waizmann U and Roth S 2002 Simple method to prepare individual suspended nanofibers Appl. Phys. Lett. 80 1815-7
    • (2002) Appl. Phys. Lett. , vol.80 , pp. 1815-1817
    • Kim, G.-T.1    Gu, G.2    Waizmann, U.3    Roth, S.4
  • 59
    • 4244187838 scopus 로고    scopus 로고
    • Tensil loading of ropes of single wall carbon nanotubes and their mechanical properties
    • Yu M-F, Files B S, Arepalli S and Ruoff R S 2000 Tensil loading of ropes of single wall carbon nanotubes and their mechanical properties Phys. Rev. Lett. 84 5552-5
    • (2000) Phys. Rev. Lett. , vol.84 , pp. 5552-5555
    • Yu, M.-F.1    Files, B.S.2    Arepalli, S.3    Ruoff, R.S.4
  • 62
    • 0346755376 scopus 로고    scopus 로고
    • Elastic properties of carbon nanotubes and nanoropes
    • Lu J P 1997 Elastic properties of carbon nanotubes and nanoropes Phys. Rev. Lett. 79 1297-300
    • (1997) Phys. Rev. Lett. , vol.79 , pp. 1297-1300
    • Lu, J.P.1
  • 63
    • 0030800875 scopus 로고    scopus 로고
    • Nanobeam mechanics: Elasticity, strength, and toughness of nanorods and nanotubes
    • Wong E W, Sheehan P E and Lieber C M 1997 Nanobeam mechanics: elasticity, strength, and toughness of nanorods and nanotubes Science 277 1971-5
    • (1997) Science , vol.277 , pp. 1971-1975
    • Wong, E.W.1    Sheehan, P.E.2    Lieber, C.M.3
  • 64
    • 0034666972 scopus 로고    scopus 로고
    • Effective bending stiffness of carbon nanotubes
    • Ru C Q 2000 Effective bending stiffness of carbon nanotubes Phys. Rev. B 62 9973-6
    • (2000) Phys. Rev. B , vol.62 , pp. 9973-9976
    • Ru, C.Q.1
  • 65
    • 0346343355 scopus 로고    scopus 로고
    • Mechanical properties of carbon nanotubes: Theoretical predictions and experimental measurements
    • Ruoff R S, Qian D and Liu W K 2003 Mechanical properties of carbon nanotubes: theoretical predictions and experimental measurements C. R. Physique 4 993-1008
    • (2003) C. R. Physique , vol.4 , pp. 993-1008
    • Ruoff, R.S.1    Qian, D.2    Liu, W.K.3
  • 67
    • 79957969630 scopus 로고    scopus 로고
    • Integration of suspended carbon nanotube arrays into electronic devices and electromechanical systems
    • Franklin N R, Wang Q, Tombler T W, Javey A, Shim M and Dai H 2002 Integration of suspended carbon nanotube arrays into electronic devices and electromechanical systems Appl. Phys. Lett. 81 913-5
    • (2002) Appl. Phys. Lett. , vol.81 , pp. 913-915
    • Franklin, N.R.1    Wang, Q.2    Tombler, T.W.3    Javey, A.4    Shim, M.5    Dai, H.6
  • 68
    • 0001138858 scopus 로고    scopus 로고
    • Carbon nanotube atomic force microscopy tips: Direct growth by chemical vapor deposition and application to high-resolution imaging
    • Cheung C L, Hafner J H and Lieber C M 2000 Carbon nanotube atomic force microscopy tips: direct growth by chemical vapor deposition and application to high-resolution imaging Proc. Natl Acad. Sci. USA 97 3809-13
    • (2000) Proc. Natl Acad. Sci. USA , vol.97 , pp. 3809-3813
    • Cheung, C.L.1    Hafner, J.H.2    Lieber, C.M.3
  • 70
    • 0032474758 scopus 로고    scopus 로고
    • Covalently functionalized nanotubes as nanometer-sized probes in chemistry and biology
    • Wong S S, Joselevich E, Wooley A T, Cheung C L and Lieber C M 1998 Covalently functionalized nanotubes as nanometer-sized probes in chemistry and biology Nature 394 52-5
    • (1998) Nature , vol.394 , pp. 52-55
    • Wong, S.S.1    Joselevich, E.2    Wooley, A.T.3    Cheung, C.L.4    Lieber, C.M.5
  • 72
    • 30444436634 scopus 로고    scopus 로고
    • Carbon nanotubes and sensors: A review
    • ed H Baltes, O Brand, G Fedder, C Hierold, J Korvink and O Tabata (New York: Wiley-VCH) chapter 10
    • Stetter J R and Maclay G J 2004 Carbon nanotubes and sensors: a review Enabling Technology for MEMS and Nanodevices ed H Baltes, O Brand, G Fedder, C Hierold, J Korvink and O Tabata (New York: Wiley-VCH) chapter 10 pp 357-82
    • (2004) Enabling Technology for MEMS and Nanodevices , pp. 357-382
    • Stetter, J.R.1    Maclay, G.J.2
  • 73
    • 0036172125 scopus 로고    scopus 로고
    • Direction-sensitive strain-mapping with carbon nanotube sensors
    • Zhao Q, Frogley M D and Wagner H D 2002 Direction-sensitive strain-mapping with carbon nanotube sensors Composite Sci. Technol. 62 147-50
    • (2002) Composite Sci. Technol. , vol.62 , pp. 147-150
    • Zhao, Q.1    Frogley, M.D.2    Wagner, H.D.3
  • 74
    • 3142653065 scopus 로고    scopus 로고
    • Characterization of e-glass - Polypropylene interfaces using carbon nanotubes as strain sensors
    • Barber A H, Zhao Q, Wagner H D and Baillie C A 2004 Characterization of E-glass - polypropylene interfaces using carbon nanotubes as strain sensors Composite Sci. Technol. 64 1915-9
    • (2004) Composite Sci. Technol. , vol.64 , pp. 1915-1919
    • Barber, A.H.1    Zhao, Q.2    Wagner, H.D.3    Baillie, C.A.4
  • 75
    • 1642587795 scopus 로고    scopus 로고
    • Nanotube film based on single-wall carbon nanotubes for strain sensing
    • Dharap P, Li Z, Nagarajaiah S and Barrera E V 2004 Nanotube film based on single-wall carbon nanotubes for strain sensing Nanotechnology 15 379-82
    • (2004) Nanotechnology , vol.15 , pp. 379-382
    • Dharap, P.1    Li, Z.2    Nagarajaiah, S.3    Barrera, E.V.4
  • 77
    • 79956055275 scopus 로고    scopus 로고
    • Electric-field-aligned growth of single-walled carbon nanotubes on surfaces
    • Ural A, Li Y and Dai H 2002 Electric-field-aligned growth of single-walled carbon nanotubes on surfaces Appl. Phys. Lett. 81 3464-6
    • (2002) Appl. Phys. Lett. , vol.81 , pp. 3464-3466
    • Ural, A.1    Li, Y.2    Dai, H.3


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