Effects of annealing and temperature on acoustic dissipation in a micromechanical silicon oscillator

Applied Physics Letters

Volumn 86, Issue 18, 2005, Pages 1-3

  Haucke, Hans ^a   Liu, Xiao ^a   Vignola, J F ^a   Houston, B H ^a   Marcus, M H ^a   Baldwin, J W ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC DISSIPATION; CRYOGENIC VACUUM; SILICON OSCILLATOR; SILICON PLATE;

ACOUSTICS; ANNEALING; COMPOSITE MICROMECHANICS; CRYOGENICS; SILICON; THERMAL EFFECTS; VACUUM APPLICATIONS;

OSCILLATORS (ELECTRONIC);

EID: 20844448197     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1921354     Document Type: Article

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