Effect of gold coating on the Q-factor of a resonant cantilever

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2249-2253

  Sandberg, R ^a   Molhave K ^a   Boisen, A ^a   Svendsen, W ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; GOLD; NATURAL FREQUENCIES; SENSORS;

ACTUATION; GOLD COATING; MICROCANTILEVERS;

SILICA;

EID: 27944502014     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/006     Document Type: Article

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