Influence of gas flow rate and entry point on ion charge, ion counts and ion energy distribution in a filtered cathodic arc

Surface and Coatings Technology

Volumn 156, Issue 1-3, 2002, Pages 110-114

  Tarrant, R N ^a   Bilek, M M M ^a   Oates, T W H ^a   Pigott, J ^a   McKenzie, D R ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

Cathodic arc; Ion energy distribution; Mean ionic charge; Nitrogen; PBII; Titanium

Indexed keywords

IONS; NITROGEN; PLASMA APPLICATIONS; TITANIUM;

ION ENERGY ANALYSERS;

FLOW CONTROL;

CATHODIC ARC PLASMA DEPOSITION; GAS FLOW; ION IMPLANTATION; MEASUREMENT METHOD; PLASMA TREATMENT;

EID: 0036641687     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00073-7     Document Type: Article

References (12)