Low-energy ion irradiation during film growth: Kinetic pathways leading to enhanced adatom migration rates

Applied Physics Letters

Volumn 86, Issue 21, 2005, Pages 1-3

  Adamovic, D ^a   Munger E P ^a   Chirita, V ^a   Hultman, L ^a   Greene, J E ^b  

^a LINKÖPING UNIVERSITY   (Sweden)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADATOM MIGRATION RATES; LOW-ENERGY ION IRRADIATION; TERRACE ATOMS; THIN FILM GROWTH TECHNIQUES;

DENSIFICATION; DEPOSITION; FILM GROWTH; MASS TRANSPORTATION; MOLECULAR DYNAMICS; PLATINUM; THIN FILMS;

IRRADIATION;

EID: 20844459101     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1940122     Document Type: Article

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