Simulation of neutral particle flow during high power magnetron impulse

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Kadlec, Stanislav ^a  

^a Staccato Consulting ^*  (Czech Republic)

Author keywords

Direct simulation Monte Carlo; Magnetron sputtering; Modeling; Pulsed discharges

Indexed keywords

DEPOSITION FLUXES; DIRECT SIMULATION MONTE CARLO; DIRECT SIMULATION MONTE CARLO METHOD; DISCHARGE CURRENTS; GAS DENSITY; GAS MOVEMENT; HIGH POWER MAGNETRONS; HIGH-POWER; MODELING; NEUTRAL PARTICLES; PLASMA REGION; PULSED DISCHARGES; VOLUME DENSITY;

ELECTRIC DISCHARGES; FLOW SIMULATION; MAGNETRONS; METAL IONS; MONTE CARLO METHODS; PLASMAS;

DENSITY OF GASES;

EID: 42549157314     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200731101     Document Type: Conference Paper

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