Parallelization and optimization of electrostatic Particle-in-Cell/Monte-Carlo Coupled codes as applied to RF discharges

Computer Physics Communications

Volumn 180, Issue 8, 2009, Pages 1305-1314

  Wang, Hong Yu ^a,b   Jiang, Wei ^a   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b ANSHAN NORMAL UNIVERSITY   (China)

Author keywords

Capacitively coupled plasma; Particle in Cell Monte Carlo Coupled; Plasma simulation; Poisson solver

Indexed keywords

CAPACITIVELY COUPLED PLASMA; CAPACITIVELY COUPLED PLASMAS; COUPLED CODE; FAST POISSON SOLVER; NUMERICAL BENCHMARK; OPTIMIZATION TECHNOLOGY; PARALLEL FRAMEWORK; PARALLELIZATION; PARTICLE SORTING; PARTICLE-IN-CELL/MONTE-CARLO COUPLED; POISSON SOLVER; RADIAL DIRECTION; RF DISCHARGE; SIMULATION RESULT;

ELECTRIC DISCHARGES; ELECTROSTATICS; INDUCTIVELY COUPLED PLASMA; PLASMA SIMULATION; POISSON DISTRIBUTION; SCREENING;

POISSON EQUATION;

EID: 67650904484     PISSN: 00104655     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cpc.2009.02.009     Document Type: Article

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