The time-resolved two-dimensional profile of a radiofrequency capacitively coupled plasma

Journal of Physics D: Applied Physics

Volumn 30, Issue 12, 1997, Pages 1783-1789

  Kitajima, T ^a   Izawa, M ^a   Nakano, N ^a   Makabe, T ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; LIGHT EMISSION; PLASMA DEVICES;

CAPACITIVELY COUPLED PLASMAS (CCP); OPTICAL EMISSION TOMOGRAPHY;

PLASMAS;

EID: 0031162559     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/30/12/015     Document Type: Article

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