Synthesis of sheath voltage drops in asymmetric radio-frequency discharges

Journal of Applied Physics

Volumn 96, Issue 1, 2004, Pages 127-132

  Yonemura, Shigeru ^a   Nanbu, Kenichi ^a   Iwata, Naoaki ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; CURRENT DENSITY; ELECTRIC POTENTIAL; ELECTRODES; MONTE CARLO METHODS; PARAMETER ESTIMATION; PLASMA ETCHING; POISSON EQUATION; SPUTTERING;

CAPACITIVELY COUPLED PLASMAS (CCP); CROSS SECTION; ELASTIC COLLISION; IONIZING COLLISION; MATERIALS PROCESSING;

PLASMA SHEATHS;

EID: 3142671385     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1759787     Document Type: Article

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