Dc self-bias voltages in radio frequency magnetron discharges

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 517-521

  Yonemura, S ^a   Nanbu, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Dc self bias voltage; Particle in cell Monte Carlo simulation; Processing plasma; Radio frequency magnetron discharges

Indexed keywords

CAPACITANCE; ELECTRIC POTENTIAL; ELECTRODES; MAGNETIC FIELDS; MAGNETRONS; MONTE CARLO METHODS;

BIAS VOLTAGES; DC SELF-BIAS VOLTAGE; FLUID SIMULATION; PARTICLE-IN-CELL SIMULATION; PROCESSING PLASMA; RADIO FREQUENCY MAGNETRON DISCHARGES;

ELECTRIC DISCHARGES;

EID: 33645228990     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.111     Document Type: Conference Paper

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