SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 519, Issue 12, 2011, Pages 4025-4031

Synthesis of Al-Cr-O-N thin films in corundum and f.c.c. structure by reactive r.f. magnetron sputtering

(4) Stueber, M a Diechle, D a Leiste, H a Ulrich, S a

a KARLSRUHE INSTITUTE OF TECHNOLOGY (Germany)

Author keywords

Magnetron sputtering; Metastable phase; Oxynitride; Solid solution

Indexed keywords

ALUMINIUM OXIDE; CHEMICAL INERTNESS; COMBINATORIAL APPROACH; DEPOSITED COATINGS; ELEMENTAL COMPOSITIONS; HIGH HARDNESS; HIGH STRENGTH; HIGH TEMPERATURE STABILITY; IDENTICAL CONDITIONS; METAL CUTTING APPLICATIONS; METASTABLE PHASE; MODERATE TEMPERATURE; MULTIFUNCTIONAL PROPERTIES; NITROGEN GAS FLOW; OXYNITRIDES; PHASE ANALYSIS; POTENTIAL MATERIALS; PVD COATINGS; R.F. MAGNETRON SPUTTERING; THIN FILM MATERIAL;

ALUMINUM; CHEMICAL STABILITY; CHROMATE COATINGS; CORUNDUM; HARDNESS; HIGH TEMPERATURE APPLICATIONS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; METAL CUTTING; METASTABLE PHASES; NITRIDES; NITROGEN; OXIDE FILMS; SOLID SOLUTIONS; SOLIDIFICATION; THIN FILMS;

CHROMIUM;

EID: 79953721921 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.01.144 Document Type: Article

Times cited : (39)

References (66)

1
- 0037427455
- J. Müller, and D. Neuschütz Vacuum 71 2003 247
- (2003) Vacuum , vol.71 , pp. 247
- Müller, J.¹ Neuschütz, D.²

2
- 27844610300
- K. Bobzin, E. Lugscheider, M. Maes, and C. Piñero Thin Solid Films 494 2006 255
- (2006) Thin Solid Films , vol.494 , pp. 255
- Bobzin, K.¹ Lugscheider, E.² Maes, M.³ Piñero, C.⁴

3
- 2342460329
- M. Voigt, and M. Sokolowski Mater. Sci. Eng. B 109 2004 99
- (2004) Mater. Sci. Eng. B , vol.109 , pp. 99
- Voigt, M.¹ Sokolowski, M.²

4
- 67349196065
- A.N. Cloud, S. Kumar, M. Kavdia, H.H. Abu-Safe, and M.H. Gordon Thin Solid Films 517 2009 5927
- (2009) Thin Solid Films , vol.517 , pp. 5927
- Cloud, A.N.¹ Kumar, S.² Kavdia, M.³ Abu-Safe, H.H.⁴ Gordon, M.H.⁵

5
- 24044446464
- S. Ruppi Int. J. Refract. Met. Hard Mater. 23 2005 306
- (2005) Int. J. Refract. Met. Hard Mater. , vol.23 , pp. 306
- Ruppi, S.¹

6
- 77954822531
- K. Sarakinos, D. Music, F. Nahif, K. Jiang, A. Braun, C. Zilkens, and J.M. Schneider Phys. Status Solidi RRL 4 2010 154
- (2010) Phys. Status Solidi RRL , vol.4 , pp. 154
- Sarakinos, K.¹ Music, D.² Nahif, F.³ Jiang, K.⁴ Braun, A.⁵ Zilkens, C.⁶ Schneider, J.M.⁷

7
- 0042202729
- Ch. Täschner, B. Ljungberg, I. Endler, and A. Leonhardt Surf. Coat. Technol. 116-119 1999 891
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 891
- Täschner, C.¹ Ljungberg, B.² Endler, I.³ Leonhardt, A.⁴

8
- 17444450431
- O. Kyrylov, R. Cremer, and D. Neuschütz Surf. Coat. Technol. 163-164 2003 203
- (2003) Surf. Coat. Technol. , vol.163-164 , pp. 203
- Kyrylov, O.¹ Cremer, R.² Neuschütz, D.³

9
- 0035387580
- Y. Yamada-Takamura, F. Koch, H. Maier, and H. Bolt Surf. Coat. Technol. 142-144 2001 260
- (2001) Surf. Coat. Technol. , vol.142-144 , pp. 260
- Yamada-Takamura, Y.¹ Koch, F.² Maier, H.³ Bolt, H.⁴

10
- 55749097420
- A.N. Cloud, S. Canovic, H.H. Abu-Safe, M.H. Gordon, and M. Halvarsson Surf. Coat. Technol. 203 2008 808
- (2008) Surf. Coat. Technol. , vol.203 , pp. 808
- Cloud, A.N.¹ Canovic, S.² Abu-Safe, H.H.³ Gordon, M.H.⁴ Halvarsson, M.⁵

11
- 72149088254
- U. Schwingenschlögl, C. Schuster, and R. Frésard Chem. Phys. Lett. 481 2009 62
- (2009) Chem. Phys. Lett. , vol.481 , pp. 62
- Schwingenschlögl, U.¹ Schuster, C.² Frésard, R.³

12
- 10844259131
- E. Wallin, J.M. Andersson, V. Chirita, and U. Helmersson J. Phys. Condens. Matter 16 2004 8971
- (2004) J. Phys. Condens. Matter , vol.16 , pp. 8971
- Wallin, E.¹ Andersson, J.M.² Chirita, V.³ Helmersson, U.⁴

13
- 50449110982
- J. Musil, V. Šatava, R. Čerstvý, P. Zeman, and T. Tölg Surf. Coat. Technol. 202 2008 6064
- (2008) Surf. Coat. Technol. , vol.202 , pp. 6064
- Musil, J.¹ Šatava, V.² Čerstvý, R.³ Zeman, P.⁴ Tölg, T.⁵

14
- 77953025654
- D. Diechle, M. Stueber, H. Leiste, S. Ulrich, and V. Schier Surf. Coat. Technol. 204 2010 3258
- (2010) Surf. Coat. Technol. , vol.204 , pp. 3258
- Diechle, D.¹ Stueber, M.² Leiste, H.³ Ulrich, S.⁴ Schier, V.⁵

15
- 0040540447
- H. Saalfeld Z. Kristallogr. 120 1964 342
- (1964) Z. Kristallogr. , vol.120 , pp. 342
- Saalfeld, H.¹

16
- 24944492649
- M. Witthaut, R. Cremer, K. Reichert, and D. Neuschütz Microchim. Acta 133 2000 191
- (2000) Microchim. Acta , vol.133 , pp. 191
- Witthaut, M.¹ Cremer, R.² Reichert, K.³ Neuschütz, D.⁴

17
- 36148995112
- J. Ramm, M. Ante, T. Bachmann, B. Widrig, H. Brändle, and M. Döbeli Surf. Coat. Technol. 202 2007 876
- (2007) Surf. Coat. Technol. , vol.202 , pp. 876
- Ramm, J.¹ Ante, M.² Bachmann, T.³ Widrig, B.⁴ Brändle, H.⁵ Döbeli, M.⁶

18
- 50349101529
- D. Levchuk, H. Bolt, M. Döbeli, S. Eggenberger, B. Widrig, and J. Ramm Surf. Coat. Technol. 202 2008 5043
- (2008) Surf. Coat. Technol. , vol.202 , pp. 5043
- Levchuk, D.¹ Bolt, H.² Döbeli, M.³ Eggenberger, S.⁴ Widrig, B.⁵ Ramm, J.⁶

19
- 0033329713
- D.E. Ashenford, F. Long, W.E. Hagston, B. Lunn, and A. Matthews Surf. Coat. Technol. 116-119 1999 699
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 699
- Ashenford, D.E.¹ Long, F.² Hagston, W.E.³ Lunn, B.⁴ Matthews, A.⁵

20
- 49349106212
- P. Eklund, M. Sridharan, M. Sillassen, and J. Bøttiger Thin Solid Films 516 2008 7447
- (2008) Thin Solid Films , vol.516 , pp. 7447
- Eklund, P.¹ Sridharan, M.² Sillassen, M.³ Bøttiger, J.⁴

21
- 10744223034
- J.M. Andersson, Zs. Czigány, P. Jin, and U. Helmersson J. Vac. Sci. Technol. A 22 2004 117
- (2004) J. Vac. Sci. Technol. A , vol.22 , pp. 117
- Andersson, J.M.¹ Czigány, Z.² Jin, P.³ Helmersson, U.⁴

22
- 0030233054
- A. von Richthofen, and R. Domnick Thin Solid Films 283 1996 37
- (1996) Thin Solid Films , vol.283 , pp. 37
- Von Richthofen, A.¹ Domnick, R.²

23
- 18444380588
- Q.M. Wang, Y.N. Wu, M.H. Guo, P.L. Ke, J. Gong, C. Sun, and L.S. Wen Surf. Coat. Technol. 197 2005 68
- (2005) Surf. Coat. Technol. , vol.197 , pp. 68
- Wang, Q.M.¹ Wu, Y.N.² Guo, M.H.³ Ke, P.L.⁴ Gong, J.⁵ Sun, C.⁶ Wen, L.S.⁷

24
- 0026120390
- W. Dehuang, and G. Liang Thin Solid Films 198 1991 207
- (1991) Thin Solid Films , vol.198 , pp. 207
- Dehuang, W.¹ Liang, G.²

25
- 0032505840
- R. Cremer, M. Witthaut, K. Reichert, M. Schierling, and D. Neuschütz Surf. Coat. Technol. 108-109 1998 48
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 48
- Cremer, R.¹ Witthaut, M.² Reichert, K.³ Schierling, M.⁴ Neuschütz, D.⁵

26
- 44649176929
- J.S. Zabinski, J.J. Hu, J.E. Bultman, N.A. Pierce, and A.A. Voevodin Thin Solid Films 516 2008 6215
- (2008) Thin Solid Films , vol.516 , pp. 6215
- Zabinski, J.S.¹ Hu, J.J.² Bultman, J.E.³ Pierce, N.A.⁴ Voevodin, A.A.⁵

27
- 0027683716
- B. Navinšek, and P. Panjan Surf. Coat. Technol. 59 1993 244
- (1993) Surf. Coat. Technol. , vol.59 , pp. 244
- Navinšek, B.¹ Panjan, P.²

28
- 0033076960
- St. Collard, H. Kupfer, G. Hecht, W. Hoyer, and H. Moussaoui Surf. Coat. Technol. 112 1999 181
- (1999) Surf. Coat. Technol. , vol.112 , pp. 181
- Collard, S.¹ Kupfer, H.² Hecht, G.³ Hoyer, W.⁴ Moussaoui, H.⁵

29
- 33750797525
- T. Suzuki, J. Inoue, H. Saito, M. Hirai, H. Suematsu, W. Jiang, and K. Yatsui Thin Solid Films 515 2006 2161
- (2006) Thin Solid Films , vol.515 , pp. 2161
- Suzuki, T.¹ Inoue, J.² Saito, H.³ Hirai, M.⁴ Suematsu, H.⁵ Jiang, W.⁶ Yatsui, K.⁷

30
- 33751029101
- M. Tacikowski, I. Ulbin-Pokorska, and T. Wierzchoń Surf. Coat. Technol. 201 2006 2776
- (2006) Surf. Coat. Technol. , vol.201 , pp. 2776
- Tacikowski, M.¹ Ulbin-Pokorska, I.² Wierzchoń, T.³

31
- 56049093013
- L. Castaldi, D. Kurapov, A. Reiter, V. Shklover, P. Schwaller, and J. Patscheider Surf. Coat. Technol. 203 2008 545
- (2008) Surf. Coat. Technol. , vol.203 , pp. 545
- Castaldi, L.¹ Kurapov, D.² Reiter, A.³ Shklover, V.⁴ Schwaller, P.⁵ Patscheider, J.⁶

32
- 33750511523
- M. Grafouté, C. Petitjean, C. Rousselot, J.F. Pierson, and J.M. Grenèche Scr. Mater. 56 2007 153
- (2007) Scr. Mater. , vol.56 , pp. 153
- Grafouté, M.¹ Petitjean, C.² Rousselot, C.³ Pierson, J.F.⁴ Grenèche, J.M.⁵

33
- 33751267273
- M. Fenker, H. Kappl, O. Banakh, N. Martin, and J.F. Pierson Surf. Coat. Technol. 201 2006 4152
- (2006) Surf. Coat. Technol. , vol.201 , pp. 4152
- Fenker, M.¹ Kappl, H.² Banakh, O.³ Martin, N.⁴ Pierson, J.F.⁵

34
- 33344473338
- S. Venkataraj, D. Severin, S.H. Mohamed, J. Ngaruiya, O. Kappertz, and M. Wuttig Thin Solid Films 502 2006 228
- (2006) Thin Solid Films , vol.502 , pp. 228
- Venkataraj, S.¹ Severin, D.² Mohamed, S.H.³ Ngaruiya, J.⁴ Kappertz, O.⁵ Wuttig, M.⁶

35
- 1342347338
- J.-M. Chappé, N. Martin, J.F. Pierson, G. Terwagne, J. Lintymer, J. Gavoille, and J. Takadoum Appl. Surf. Sci. 225 2004 29
- (2004) Appl. Surf. Sci. , vol.225 , pp. 29
- Chappé, J.-M.¹ Martin, N.² Pierson, J.F.³ Terwagne, G.⁴ Lintymer, J.⁵ Gavoille, J.⁶ Takadoum, J.⁷

36
- 71049148328
- M. Lerch, J. Janek, K.D. Becker, S. Berendts, H. Boysen, T. Bredow, R. Dronskowski, S.G. Ebbinghaus, M. Kilo, M.W. Lumey, M. Martin, C. Reimann, E. Schweda, I. Valov, and H.D. Wiemhöfer Prog. Solid State Chem. 37 2009 81
- (2009) Prog. Solid State Chem. , vol.37 , pp. 81
- Lerch, M.¹ Janek, J.² Becker, K.D.³ Berendts, S.⁴ Boysen, H.⁵ Bredow, T.⁶ Dronskowski, R.⁷ Ebbinghaus, S.G.⁸ Kilo, M.⁹ Lumey, M.W.¹⁰ Martin, M.¹¹ Reimann, C.¹² Schweda, E.¹³ Valov, I.¹⁴ Wiemhöfer, H.D.¹⁵

37
- 33847140235
- J. Sjölén, L. Karlsson, S. Braun, R. Murdey, A. Hörling, and L. Hultman Surf. Coat. Technol. 201 2007 6392
- (2007) Surf. Coat. Technol. , vol.201 , pp. 6392
- Sjölén, J.¹ Karlsson, L.² Braun, S.³ Murdey, R.⁴ Hörling, A.⁵ Hultman, L.⁶

38
- 33846605522
- Y. Liu, Y. Dong, W. Zhao, and G. Li Int. J. Refract. Met. Hard Mater. 25 2007 271
- (2007) Int. J. Refract. Met. Hard Mater. , vol.25 , pp. 271
- Liu, Y.¹ Dong, Y.² Zhao, W.³ Li, G.⁴

39
- 0035848984
- H.J. Seifert, A. Kussmaul, and F. Aldinger J. Alloy. Compd. 317-318 2001 19
- (2001) J. Alloy. Compd. , vol.317-318 , pp. 19
- Seifert, H.J.¹ Kussmaul, A.² Aldinger, F.³

40
- 0033638489
- B. Huneau, J.J. Ding, P. Rogl, J. Bauer, X.Y. Ding, and M. Bohn J. Solid State Chem. 155 2000 71
- (2000) J. Solid State Chem. , vol.155 , pp. 71
- Huneau, B.¹ Ding, J.J.² Rogl, P.³ Bauer, J.⁴ Ding, X.Y.⁵ Bohn, M.⁶

41
- 0025628410
- R. Luthier, and F. Lévy Vacuum 41 1990 2205
- (1990) Vacuum , vol.41 , pp. 2205
- Luthier, R.¹ Lévy, F.²

42
- 65649087942
- C.-L. Chang, and C.-W. Wu Thin Solid Films 517 2009 5219
- (2009) Thin Solid Films , vol.517 , pp. 5219
- Chang, C.-L.¹ Wu, C.-W.²

43
- 0033534997
- E.V. Shalaeva, S.V. Borisov, O.F. Denisov, and M.V. Kuznetsov Thin Solid Films 339 1999 129
- (1999) Thin Solid Films , vol.339 , pp. 129
- Shalaeva, E.V.¹ Borisov, S.V.² Denisov, O.F.³ Kuznetsov, M.V.⁴

44
- 33644923192
- Y.C. Ee, Z. Chen, S.B. Law, and S. Xu Thin Solid Films 504 2006 218
- (2006) Thin Solid Films , vol.504 , pp. 218
- Ee, Y.C.¹ Chen, Z.² Law, S.B.³ Xu, S.⁴

45
- 62349123476
- I.A. Khan, M. Hassan, T. Hussain, R. Ahmad, M. Zakaullah, and R.S. Rawat Appl. Surf. Sci. 255 2009 6132
- (2009) Appl. Surf. Sci. , vol.255 , pp. 6132
- Khan, I.A.¹ Hassan, M.² Hussain, T.³ Ahmad, R.⁴ Zakaullah, M.⁵ Rawat, R.S.⁶

46
- 0041529702
- M. Hirai, T. Suzuki, H. Suematsu, W. Jiang, and K. Yatsui J. Vac. Sci. Technol. A 21 2003 947
- (2003) J. Vac. Sci. Technol. A , vol.21 , pp. 947
- Hirai, M.¹ Suzuki, T.² Suematsu, H.³ Jiang, W.⁴ Yatsui, K.⁵

47
- 33748426178
- A. Kayani, R.J. Smith, S. Teintze, M. Kopczyk, P.E. Gannon, M.C. Deibert, V.I. Gorokhovsky, and V. Shutthanandan Surf. Coat. Technol. 201 2006 1685
- (2006) Surf. Coat. Technol. , vol.201 , pp. 1685
- Kayani, A.¹ Smith, R.J.² Teintze, S.³ Kopczyk, M.⁴ Gannon, P.E.⁵ Deibert, M.C.⁶ Gorokhovsky, V.I.⁷ Shutthanandan, V.⁸

48
- 39349090981
- P.E. Gannon, A. Kayani, C.V. Ramana, M.C. Deibert, R.J. Smith, and V.I. Gorokhovsky Electrochem. Solid State Lett. 11 2008 B54
- (2008) Electrochem. Solid State Lett. , vol.11 , pp. 54
- Gannon, P.E.¹ Kayani, A.² Ramana, C.V.³ Deibert, M.C.⁴ Smith, R.J.⁵ Gorokhovsky, V.I.⁶

49
- 79953679649
- W. Michaeli, K. Bobzin, S. Hessner, A. Neuss, and F. Manz Kunststoffe 8 2006 66
- (2006) Kunststoffe , vol.8 , pp. 66
- Michaeli, W.¹ Bobzin, K.² Hessner, S.³ Neuss, A.⁴ Manz, F.⁵

50
- 0036757478
- Y. Choi, H. Chang, J.D. Lee, and E. Kim, K. No Jpn. J. Appl. Phys. 41 2002 5805
- (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 5805
- Choi, Y.¹ Chang, H.² Lee, J.D.³ No Kim, E.K.⁴

51
- 55749109047
- M. Stüber, U. Albers, H. Leiste, K. Seemann, C. Ziebert, and S. Ulrich Surf. Coat. Technol. 203 2008 661
- (2008) Surf. Coat. Technol. , vol.203 , pp. 661
- Stüber, M.¹ Albers, U.² Leiste, H.³ Seemann, K.⁴ Ziebert, C.⁵ Ulrich, S.⁶

52
- 77955654794
- I.M. Ross, W.M. Rainforth, C.R. Seabourne, A.J. Scott, P. Wang, B.G. Mendis, A.L. Bleloch, C. Reinhard, and P.Eh. Hovsepian Thin Solid Films 518 2010 5121
- (2010) Thin Solid Films , vol.518 , pp. 5121
- Ross, I.M.¹ Rainforth, W.M.² Seabourne, C.R.³ Scott, A.J.⁴ Wang, P.⁵ Mendis, B.G.⁶ Bleloch, A.L.⁷ Reinhard, C.⁸ Hovsepian, P.Eh.⁹

53
- 77951297094
- A. Karimi, M. Morstein, and T. Cselle Surf. Coat. Technol. 204 2010 2716
- (2010) Surf. Coat. Technol. , vol.204 , pp. 2716
- Karimi, A.¹ Morstein, M.² Cselle, T.³

54
- 0037299702
- S. Hampshire J. Non-Cryst. Solids 316 2003 64
- (2003) J. Non-Cryst. Solids , vol.316 , pp. 64
- Hampshire, S.¹

55
- 36649001387
- R.-J. Xie, and N. Hirosaki Sci. Technol. Adv. Mater. 8 2007 588
- (2007) Sci. Technol. Adv. Mater. , vol.8 , pp. 588
- Xie, R.-J.¹ Hirosaki, N.²

56
- 34247597851
- G.C.A.M. Janssen Thin Solid Films 515 2007 6654
- (2007) Thin Solid Films , vol.515 , pp. 6654
- Janssen, G.C.A.M.¹

57
- 29244470792
- A.E. Reiter, V.H. Derflinger, B. Hanselmann, T. Bachmann, and B. Sartory Surf. Coat. Technol. 200 2005 2114
- (2005) Surf. Coat. Technol. , vol.200 , pp. 2114
- Reiter, A.E.¹ Derflinger, V.H.² Hanselmann, B.³ Bachmann, T.⁴ Sartory, B.⁵

58
- 0003998388
- CRC Press
- R.C. Weast, and M.J. Astle CRC Handbook of Chemistry and Physics, 62. ed 1981 CRC Press pp. B-73, B-74 and B-93.
- (1981) CRC Handbook of Chemistry and Physics, 62. Ed
- Weast, R.C.¹ Astle, M.J.²

59
- 50649105489
- P.H. Mayrhofer, H. Willmann, and A.E. Reiter Surf. Coat. Technol. 202 2008 4935
- (2008) Surf. Coat. Technol. , vol.202 , pp. 4935
- Mayrhofer, P.H.¹ Willmann, H.² Reiter, A.E.³

60
- 0001210565
- Y. Makino, and K. Nogi Surf. Coat. Technol. 98 1998 1008
- (1998) Surf. Coat. Technol. , vol.98 , pp. 1008
- Makino, Y.¹ Nogi, K.²

61
- 0031384063
- A. Sugishima, H. Kajioka, and Y. Makino Surf. Coat. Technol. 97 1997 590
- (1997) Surf. Coat. Technol. , vol.97 , pp. 590
- Sugishima, A.¹ Kajioka, H.² Makino, Y.³

62
- 56549122191
- H. Willmann, P.H. Mayrhofer, L. Hultman, and C. Mitterer J. Mater. Res. 23 2008 2880
- (2008) J. Mater. Res. , vol.23 , pp. 2880
- Willmann, H.¹ Mayrhofer, P.H.² Hultman, L.³ Mitterer, C.⁴

63
- 34249060404
- T. Li, M. Li, and Y. Zhou Surf. Coat. Technol. 201 2007 7692
- (2007) Surf. Coat. Technol. , vol.201 , pp. 7692
- Li, T.¹ Li, M.² Zhou, Y.³

64
- 56949102072
- K. Bobzin, N. Bagcivan, P. Immich, S. Bolz, R. Cremer, and T. Leyendecker Thin Solid Films 517 2008 1251
- (2008) Thin Solid Films , vol.517 , pp. 1251
- Bobzin, K.¹ Bagcivan, N.² Immich, P.³ Bolz, S.⁴ Cremer, R.⁵ Leyendecker, T.⁶

65
- 34548258288
- D. Rafaja, C. Wüstefeld, M. Dopita, M. Růžička, V. Klemm, G. Schreiber, D. Heger, and M. Šíma Surf. Coat. Technol. 201 2007 9476
- (2007) Surf. Coat. Technol. , vol.201 , pp. 9476
- Rafaja, D.¹ Wüstefeld, C.² Dopita, M.³ Růžička, M.⁴ Klemm, V.⁵ Schreiber, G.⁶ Heger, D.⁷ Šíma, M.⁸

66
- 28844452148
- X.-Z. Ding, and X.T. Zeng Surf. Coat. Technol. 200 2005 1372
- (2005) Surf. Coat. Technol. , vol.200 , pp. 1372
- Ding, X.-Z.¹ Zeng, X.T.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.