Ionized physical vapor deposited Al2O3 films: Does subplantation favor formation of α-Al2O3?

Physica Status Solidi - Rapid Research Letters

Volumn 4, Issue 7, 2010, Pages 154-156

  Sarakinos, K ^a,b   Music, D ^a   Nahif, F ^a   Jiang, K ^a   Braun, A ^a   Zilkens, C ^a   Schneider, J M ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

Al2O3; Alumina; Vapor deposition

Indexed keywords

AL2O3; CATHODIC ARC DISCHARGES; ENERGY DISTRIBUTIONS; GROWING FILMS; ION ENERGIES; ION SURFACE INTERACTIONS; MONOENERGETIC; MONTE CARLO; PHASE FORMATIONS; PHYSICAL VAPOR DEPOSITED; SUBPLANTATION; SUBSTRATE TEMPERATURE; THERMODYNAMICALLY STABLE;

ION BEAM ASSISTED DEPOSITION; IONIZATION; IONS; STRUCTURAL ANALYSIS; VAPOR DEPOSITION; VAPORS;

ALUMINUM;

EID: 77954822531     PISSN: 18626254     EISSN: 18626270     Source Type: Journal    
DOI: 10.1002/pssr.201004133     Document Type: Article

References (27)

1. M. Aguilar-Frutis, M. Garcia, and C. Falcony, Appl. Phys. Lett. 72, 1700 (1998).
2. H. C. Lin, H. L. Wang, and M. H. Hon, Thin Solid Films 283, 171 (1996).
3. P. J. Kelly and R. D. Arnell, J. Vac. Sci. Technol. A 17, 945 (1999).
4. G. Dingemans, R. Seguin, P. Engelhart, M. C. M. van de Sanden, and W. M. M. Kessels, Phys. Status Solidi RRL 4, 10 (2010).
5. J. Benick, A. Richter, M. Hermle, and S. W. Glunz, Phys. Status Solidi RRL 3, 233 (2009).
6. S. Rupi, Int. J. Refract. Met. Hard Mater. 23, 306 (2005).
7. O. Zywitzki, G. Hoetzsch, F. Fietzke, and K. Goedicke, Surf. Coat. Technol. 169, 82 (1996).
8. E. Wallin, T. I. Selinder, M. Elfwing, and U. Helmersson, Europhys. Lett. 82, 36002 (2008).
9. D. Kurapov, J. Reiss, D. H. Trinh, L. Hultman, and J. M. Schneider, J. Vac. Sci. Technol. A 25, 831 (2007).
10. Y. Yamada-Takamura, F. Koch, H. Maier, and H. Bolt, Surf. Coat. Technol. 142-144, 206 (2001).
11. P. Jin, G. Xu, M. Tazawa, K. Yoshimura, D. Music, J. Alami, and U. Helmersson, J. Vac. Sci. Technol. A 20, 2134 (2002).
12. I. Levin and D. Brandon, J. Am. Ceram. Soc. 81, 1996 (1998).
13. J. Rosén, J. M. Schneider, and K. Larsson, Solid State Commun. 134, 333 (2005).
14. O. Kyrylov, D. Kurapov, and J. M. Schneider, Appl. Phys. A 80, 1657 (2005).
15. J. M. Schneider, A. Anders, B. Hjörvarsson, I. Petrov, K. Macák, U. Helmersson, and J. E. Sundgren, Appl. Phys. Lett. 74, 200 (1999).
16. R. Snyders, K. Jiang, D. Music, S. Konstantinidis, T. Mar-kus, A. Reinholdt, J. Mayer, and J. M. Schneider, Surf. Coat. Technol. 204, 215 (2009).
17. E. Wallin, E. P. Münger, V. Chirita, and U. Helmersson, J. Phys. D, Appl. Phys. 42, 125302 (2009).
18. I. G. Brown, Rev. Sci. Instrum. 65, 3061 (1994).
19. J. Rosén, A. Anders, S. Mráz, A. Atiser, and J. M. Schnei-der, J. Appl. Phys. 99, 123303 (2006).
20. J. Rosén, A. Anders, S. Mráz, and J. M. Schneider, J. Appl. Phys. 97, 103306 (2005).
21. A. Atiser, S. Mráz, and J. M. Schneider, J. Phys. D, Appl. Phys. 42, 015202 (2009).
22. http//www.srim.org.
23. International Centre for Diffraction Data 1999 JCPDS Powder Diffraction File No 10-425.
24. International Centre for Diffraction Data 1999 JCPDS Powder Diffraction File No 23-1009.
25. International Centre for Diffraction Data 1999 JCPDS Powder Diffraction File No 46-1212.
26. Y. Lifshitz, S. R. Kasi, and J. W. Rabalais, Phys. Rev. Lett. 62, 1290 (1989).
27. S. Esch, M. Bott, T. Michely, and G. Comsa, Appl. Phys. Lett. 67, 3209 (1995).