Microstructure and mechanical properties of (Al, Ti)(O, N) coatings prepared by reactive sputtering

International Journal of Refractory Metals and Hard Materials

Volumn 25, Issue 3, 2007, Pages 271-274

  Liu, Yan ^a   Dong, Yunshan ^a   Zhao, Wenji ^a   Li, Geyang ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

(Al, Ti)(O, N) coating; Mechanical properties; Microstructure; Reactive sputtering

Indexed keywords

ENERGY DISPERSIVE SPECTROSCOPY; MICROSTRUCTURE; MIXTURES; RATE CONSTANTS; SPUTTERING; STOICHIOMETRY; X RAY DIFFRACTION;

OXYGEN CONTENT; REACTIVE SPUTTERING; STOICHIOMETRIC CONSTANT;

POWDER COATINGS;

EID: 33846605522     PISSN: 02634368     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijrmhm.2006.07.003     Document Type: Article

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