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Volumn 112, Issue 1-3, 1999, Pages 181-184

The reactive magnetron deposition of CrNxOy films: First results of property investigations

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM COMPOUNDS; CRYSTAL ORIENTATION; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; MICROHARDNESS; NITROGEN; OXYGEN; SPUTTER DEPOSITION; STRAIN; TEXTURES; TITANIUM NITRIDE; WEAR RESISTANCE;

EID: 0033076960     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00752-X     Document Type: Article
Times cited : (37)

References (9)
  • 3
    • 0842312601 scopus 로고
    • in: R.-J. Peters (Ed.), VDI, Düsseldorf
    • R. Elsing, in: R.-J. Peters (Ed.), Beschichten mit Hartstoffen, VDI, Düsseldorf, 1991, p. 1.
    • (1991) Beschichten Mit Hartstoffen , pp. 1
    • Elsing, R.1
  • 4
    • 0039947598 scopus 로고
    • International Center for Diffraction Data, Swarthmore
    • JCPDS-Data files, no. 38-1479, International Center for Diffraction Data, Swarthmore, 1992.
    • (1992) JCPDS-Data Files, No. 38-1479


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.