|
Volumn 112, Issue 1-3, 1999, Pages 181-184
|
The reactive magnetron deposition of CrNxOy films: First results of property investigations
|
Author keywords
[No Author keywords available]
|
Indexed keywords
CHROMIUM COMPOUNDS;
CRYSTAL ORIENTATION;
GRAIN SIZE AND SHAPE;
MAGNETRON SPUTTERING;
MICROHARDNESS;
NITROGEN;
OXYGEN;
SPUTTER DEPOSITION;
STRAIN;
TEXTURES;
TITANIUM NITRIDE;
WEAR RESISTANCE;
CHROMIUM NITRIDE;
CERAMIC COATINGS;
|
EID: 0033076960
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(98)00752-X Document Type: Article |
Times cited : (37)
|
References (9)
|