Deposition of hard crystalline Al2O3 coatings by pulsed d.c. PACVD

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 891-897

  Taschner Ch ^a   Ljungberg, B ^b   Endler, I ^a   Leonhardt, A ^a  

^a IFW DRESDEN   (Germany)

^b AB Sandvik Coromant   (Sweden)

Author keywords

Al2O3; Al2O3; Cemented carbide; PACVD

Indexed keywords

AMORPHOUS FILMS; CERAMIC COATINGS; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; CRYSTALLINE MATERIALS; HARDNESS; HIGH TEMPERATURE EFFECTS; PLASMA APPLICATIONS; SURFACE ROUGHNESS; TRANSPARENCY; WEAR OF MATERIALS; X RAY DIFFRACTION ANALYSIS;

PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITION (PACVD);

ALUMINA;

ALUMINUM OXIDE; CEMENTED CARBIDE; CERAMIC COATING; PLASMA TREATMENT; STEEL; VAPOR DEPOSITION;

EID: 0042202729     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00148-6     Document Type: Conference Paper

References (20)

1. Fredriksson E., Carlsson J.-O. J. Chem. Vap. Dep. 1:1993;333.
2. Lux B., Colombier C., Altena H., Sternberg K. Thin Solid Films. 138:1986;49.
3. Fredriksson E., Carlsson J.-O. Surf. Coat. Technol. 56:1993;165.
4. Koh W., Ku S.-J., Kim Y. Thin Solid Films. 304:1997;222.
5. Haanappel V.A.C., Rem J.B., van Corbach H.D., Fransen T., Gellings P.J. Surf. Coat. Technol. 72:1995.
6. Kim Y.-C., Park H.H., Chun J.S., Lee W.-J. Thin Solid Films. 237:1994;57.
7. Schneider J.M., Sproul W.D., Matthews A. Surf. Coat. Technol. 98:1998;1473.
8. Zywitzki O., Hoetzsch G. Surf. Coat. Technol. 76/77:1995;754.
9. Fietzke F., Goedicke K., Hempel W. Surf. Coat. Technol. 86/87:1996;657.
10. Wolfe G.J., Petrowsky C.J., Quito D.T. J. Vac. Sci. Technol. A4:1986;2747.
11. Lin C.H., Wang H.L., Hon M.H. Surf. Coat. Technol. 90:1997;102.
12. Patscheider J., Veprek S. Plasma Chem. Plasma Process. 12:1992;129.
13. Tabersky R., van den Berg H., König U. Int. J. Refract. Metals. Hard Mater. 14:1996;79.
14. Täschner Ch., Ljungberg B., Alfredsson V., Endler I., Leonhardt A. Surf. Coat. Technol. 108/109:1998;257.
15. Kawai H., Ukegawa H., Yoshioka T., Doi A. Surf. Coat. Technol. 50:1992;85.
16. Dragoo A.L., Diamond J.M. J. Am. Cer. Soc. 50:1967;568.
17. Aspar B., Armas B., Combescure C., Thenegal D. J. Phys. IV colloq. C2:1991;665.
18. Labatut C., Rodriguez-Clemente R., Armas B. Adv. Inorg. Films and Coat. 1995;423.
19. Leonhardt A., Endler I. Ceramics International. 21:1995;421.
20. Colombier C., Lux B. J. Mater. Sci. 24:1989;462.