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Thin Solid Films

Volumn 283, Issue 1-2, 1996, Pages 37-44

Metastable single-phase polycrystalline aluminium oxynitride films grown by MSIP: Constitution and structure

(2) Von Richthofen, A a Domnick, R a

a RWTH AACHEN UNIVERSITY (Germany)

Author keywords

Aluminium nitride; Aluminium oxide; Aluminium oxynitride; Auger electron spectroscopy; Coatings; Ion plating

Indexed keywords

ALUMINA; AUGER ELECTRON SPECTROSCOPY; CHEMICAL VAPOR DEPOSITION; COATINGS; ELECTROPLATING; FILM GROWTH; MAGNETRON SPUTTERING; PHASE EQUILIBRIA; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

ION PLATING; METASTABLE SINGLE PHASE POLYCRYSTALLINE ALUMINIUM OXYNITRIDE FILMS; PHYSICAL VAPOR DEPOSITION; REACTIVE MAGNETRON SPUTTERING ION PLATING;

THIN FILMS;

EID: 0030233054 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/0040-6090(95)08256-5 Document Type: Article

Times cited : (50)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.