Electron energy loss spectroscopy of nano-scale CrAlYN/CrN-CrAlY(O)N/Cr(O)N multilayer coatings deposited by unbalanced magnetron sputtering

Thin Solid Films

Volumn 518, Issue 18, 2010, Pages 5121-5127

  Ross, I M ^a   Rainforth, W M ^a   Seabourne, C R ^b   Scott, A J ^b   Wang, P ^c   Mendis, B G ^c   Bleloch, A L ^c   Reinhard, C ^d   Hovsepian, P Eh ^d  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

^b UNIVERSITY OF LEEDS   (United Kingdom)

^c DARESBURY LABORATORY   (United Kingdom)

^d SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

Author keywords

Aberration corrected electron microscopy; CrAlYN CrN; Electron energy loss spectroscopy; Magnetron sputtering

Indexed keywords

ABERRATION-CORRECTED ELECTRON MICROSCOPY; BEST MATCH; CHEMICAL DISTRIBUTIONS; CRALYN/CRN; DIFFUSE INTERFACE; EDGE STRUCTURES; ELECTRON DENSITY FUNCTIONAL THEORIES; ELECTRON ENERGY LOSS; ELECTRON ENERGY LOSS SPECTRUM; MULTI-LAYER-COATING; NANO SCALE; NEAR STOICHIOMETRIC; NITRIDE LAYERS; NITRIDE SURFACE; OXIDATION RESISTANT COATING; OXYGEN CONTENT; SCANNING TRANSMISSION ELECTRON MICROSCOPES; SPHERICAL ABERRATIONS; SUBNANOMETER RESOLUTION; UNBALANCED MAGNETRON SPUTTERING;

ABERRATIONS; CHEMICALS; CHROMIUM; DENSITY FUNCTIONAL THEORY; DISSOCIATION; ELECTRON EMISSION; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ELECTRONS; ENERGY DISSIPATION; INORGANIC COATINGS; MAGNETRON SPUTTERING; MULTILAYERS; NANOSTRUCTURED MATERIALS; NITRIDES; NUCLEAR INSTRUMENTATION; OXYGEN; SPECTROSCOPIC ANALYSIS; SPECTRUM ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 77955654794     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.03.012     Document Type: Article

References (56)

1. C. Leyens, R. Braun, M. Froehlich, and P.Eh. Hovsepian JOM 58 1 2006 17
2. M. Fröhlich, R. Braun, and C. Leyens Surf. Coat. Technol. 201 7 2006 3911
3. P.Eh. Hovsepian, D.B. Lewis, Q. Luo, W.D. Münz, P.H. Mayrhofer, C. Mitterer, Z. Zhou, and W.M. Rainforth Thin Solid Films 485 1-2 2005 160
4. J.A. Ghani, I.A. Choudhury, and H.H. Masjuki J. Mater. Process. Tech. 153-154 2004 1062
5. M. Sokovic, J. Kopac, L.A. Dobrzanski, and M. Adamiak J. Mater. Process. Tech. 157-158 2004 422
6. P.Eh. Hovsepian, Q. Luo, G. Robinson, M. Pittman, M. Howarth, D. Doerwald, R. Tietema, W.M. Sim, A. Deeming, and T. Zeus Sur. Coat. Technol. 201 1-2 2006 265
7. L. Guzman, G.K. Wolf, and G.M. Davies Surf. Coat. Technol. 174-175 2003 665
8. Q. Luo, G. Robinson, M. Pittman, M. Howarth, W.-M. Sim, M.R. Stalley, H. Leitner, R. Ebner, D. Caliskanoglu, and P.Eh. Hovsepian Surf. Coat. Technol. 200 2005 123
9. Scripta Materialia View Point Set No.34: Deformation and Stability of Nanoscale Metallic Multilayers Scripta Mater. 50 2005 707
10. Z. Zhou, W.M. Rainforth, D.B. Lewis, S. Creasy, J.J. Forsyth, F. Clegg, A.P. Ehiasarian, P.Eh. Hovespian, and W.-D. Münz Surf. Coat. Technol. 177-178 2004 198
11. C. Leyens, M. Peters, P.Eh. Hovsepian, D.B. Lewis, Q. Lou, and W.D. Münz Surf. Coat. Technol. 155 2002 103
12. P.Eh. Hovsepian, C. Reinhard, and A.P. Ehiasarian Surf. Coat. Technol. 201 2006 4105
13. C. Reinhard, A.P. Ehiasarian, and P.Eh. Hovsepian Plasma Process Polym. 4 2007 S910
14. L.A. Donohue, I.J. Smith, W.D. Munz, I. Petrov, and J.E. Greene Surf. Coat. Technol. 94-95 1997 226
15. F. Rovere, and P.H. Mayrhofer J. Vac. Sci. Technol. A 25 2007 1336
16. F. Rovere, and P.H. Mayrhofer J. Vac. Sci. Technol. A 26 2008 29
17. F. Rovere, P.H. Mayrhofer, A. Reinholdt, J. Mayer, and J.M. Schneider Surf. Coat. Technol. 202 2008 5870
18. R.G. Hoagland, R.J. Kurtz, and C.H. Henager Scripta Mater. 50 2004 775
19. F. Spaepen, and D.Y.W. Yu Scripta Mater. 50 2004 729
20. L.H. Friedman Scripta Mater. 50 2004 763
21. B. Rother, G. Ebersbach, and H.M. Gabriel Surf. Coat. Technol. 116-119 1999 694
22. B. Rother Surf. Coat. Technol. 64 1994 155
23. B. Rother, H.A. Jehn, and H.M. Gabriel Surf. Coat. Technol. 86-87 1993 207
24. X. Chu, and S.A. Barnett J. Appl. Phys. 77 1995 4403
25. P.M. Anderson, and C. Li Nanostruct. Mater. 5 1995 349
26. K. Tönshoff, B. Karpuschewski, A. Mohlfield, T. Leyendecker, G. Erkens, H.G. Fuß, and R. Wenke Surf. Coat. Technol. 108-109 1998 535
27. A.P. Ehiasarian, R. Newa, W.-D. Münz, L. Hultman, U. Helmersson, and V. Kouznetsov Vacuum 65 2002 147
28. M. Lattemann, A.P. Ehiasarian, J. Bohlmark, P.Å.O. Persson, and U. Helmersson Surf. Coat. Technol. 200 2006 6495
29. A.P. Ehiasarian, J.G. Wen, and I. Petrov J. Appl. Phys. 101 2007 054301
30. M.I. Lembke, J.M. Titchmarch, and W.-D. Münz M. Aindow, C.J. Kiely, Electron Microscopy and Analysis Group Conference, EMAG2001, Dundee, September 5-7, 2001 Inst. Phys. Conf. Ser. 168 2001 365
31. N. Dellby, O.L. Krivanek, P.D. Nellist, P.E. Batson, and A.R. Lupini J. Electron. Microsc. (Jpn) 50 2001 177
32. Z. Zhou, W.M. Rainforth, U. Falke, M. Falke, A. Bleloch, and P.Eh. Hovsepian Phil. Mag. 87 2007 3175
33. K. Schwarz, P. Blaha, and G.K.H. Madsen Comp. Phys. Commun. 147 2002 71
34. J.P. Perdew, K. Burke, and M. Ernzerhof Phys. Rev. Lett. 77 1996 3865
35. K. Jorissen, J. Luitz, and C. Hébert D. Müller, Enhanced Data Generated with Electrons - A Program for the Calculation of Energy Loss Near Edge Structure - The New and Improved TELNES.2 Code 2005
36. C. Hébert, J. Luitz, and P. Schattschneider Micron 34 2003 219
37. M. Panjan, S. Šturm, P. Panjan, and M. Čekada Surf. Coat. Technol. 202 2007 185
38. J. Zhu, D. Zhao, W.B. Lou, Y. Zhang, and Y.R. Li J. Cryst. Growth 310 2008 731
39. S.H. Jhi, and J. Ihm Phys. Rev. B. 56 1997 13826
40. L. Calmels, C. Mirguet, and Y. Kihn Phys. Rev. B. 73 2006 024207
41. A.J. Scott, R. Brydson, M. MacKenzie, and A.J. Craven Phys. Rev. B. 67 2001 245105
42. P. Moreau, F. Boucher, G. Goglio, D. Foy, V. Mauchamp, and G. Ouvrard Phys. Rev. B. 73 2006 195111
43. A. Sugishima, H. Kajioka, and Y. Makino Surf. Coat. Technol. 97 1997 590
44. A.E. Reiter, V.H. Derflinger, B. Hanselmann, T. Bachmannn, and B. Sartory Surf. Coat Technol. 200 2005 2114
45. H. Willmann, P.H. Mayrhofer, P.O.A. Persson, A.E. Reiter, L. Hultman, and C. Mitterer Scripta Mater. 54 2006 1847
46. T. Hurkmans, D.B. Lewis, J.S. Brooks, and W.-D. Münz Surf. Coat. Technol. 86-97 1996 192
47. R.F. Egerton Electron Energy Loss Spectroscopy in the Electron Microscope 2nd edition 1996 Kluwer Academic/Plenum Publishers
48. H. Meidia, A.G. Cullis, C. Schonjahn, W.-D. Münz, and J.M. Rodenburg Surf. Coat. Technol. 151-152 2002 209
49. Z. Zhou, W.M. Rainforth, B. Rother, A.P. Ehiasarian, P.Eh. Hovsepian, and W.-D. Münz Surf. Coat. Technol. 183 2004 275
50. A.T. Paxton, M. van Schilfgaarde, M. MacKenzie, and A.J. Craven J. Phys. Condens. Matter. 12 2000 729
51. C. Mitterbauer, C. Hébert, G. Kothleitner, F. Hofer, P. Schattschneider, and H.W. Zandbergen Solid State Commun. 130 2004 209
52. X.-Z. Ding, and X.T. Zeng Surf. Coat. Technol. 200 2005 1372
53. D. Depla, and R. De Gryse Surf. Coat. Technol. 183 2004 190
54. O. Kubaschewski, C.B. Alcock, and P.J. Spencer Materials Thermochemistry 6th edition 1993 Pergamon Press New York 257
55. I.M. Ross, W.M. Rainforth, Z. Zhou, J.C. Walker, C. Reinhard, A.P. Ehiasarian, P.Eh. Hovsepian, R. Braun, and C. Leyens Y.-W. Kim, D. Morris, R. Yang, C. Leyens, Structural Alumindes for Elevated Temperatures 2008 TMS New Orleans (Warrendale, PA) 315
56. J.C. Walker, I.M. Ross, C. Reinhard, W.M. Rainforth, and P.Eh. Hovsepian Wear 267 2009 965