Formation of crystalline Al-Ti-O thin films and their properties

Surface and Coatings Technology

Volumn 202, Issue 24, 2008, Pages 6064-6069

  Musil, J ^a   Satava V ^a   Cerstvy R ^a   Zeman, P ^a   Tolg T ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Al Ti O thin film; Crystallization; Mechanical properties; Oxidation resistance; Reactive magnetron sputtering; Structure

Indexed keywords

THICK FILMS;

AL-TI-O THIN FILM; CRYSTALLIZATION; EFFECT OF ADDITION; MECHANICAL PROPERTIES; OXIDATION RESISTANCE; REACTIVE MAGNETRON SPUTTERING; STRUCTURE; THIN FILMS;

ALUMINUM;

EID: 50449110982     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.07.012     Document Type: Article

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