Structure and mechanical properties of arc evaporated Ti-Al-O-N thin films

Surface and Coatings Technology

Volumn 201, Issue 14, 2007, Pages 6392-6403

  Sjolen J ^a   Karlsson, L ^a   Braun, S ^b   Murdey, R ^b   Horling A ^b   Hultman, L ^b  

^a SECO TOOLS AB   (Sweden)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

Arc evaporation; Mechanical properties; Nanostructure; TiAlON

Indexed keywords

DEFORMATION; DUCTILITY; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; STRUCTURAL PROPERTIES; THIN FILMS;

ARC DEPOSITION; ARC-EVAPORATION; GAS FLOW-RATIO;

PROTECTIVE COATINGS;

DEFORMATION; DUCTILITY; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; PROTECTIVE COATINGS; STRUCTURAL PROPERTIES; THIN FILMS;

EID: 33847140235     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.12.006     Document Type: Article

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