Deposition of alumina hard coatings by bipolar pulsed PECVD

Surface and Coatings Technology

Volumn 163-164, Issue , 2003, Pages 203-207

  Kyrylov, O ^a   Cremer, R ^a   Neuschutz D ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Alumina; PECVD; Power density

Indexed keywords

ADHESION; COMPOSITION; HARDNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA SOURCES; STEEL;

ALUMINA HARD COATINGS;

INORGANIC COATINGS;

ALUMINUM OXIDE; CERAMIC COATING; CHEMICAL VAPOR DEPOSITION; HARDNESS;

EID: 17444450431     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00482-6     Document Type: Article

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