A new paradigm In thin film Indentation

Journal of Materials Research

Volumn 25, Issue 9, 2010, Pages 1671-1678

  Zhou, Bo ^a   Prorok, Barton C ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATED VALUES; COMPLIANT SUBSTRATES; CONTINUOUS STIFFNESS METHODS; ELASTIC INTERFACES; FILM MODULUS; FILM/SUBSTRATE COMPOSITES; INDENTERS; MEMBRANE DEFLECTIONS; POISSON'S RATIO; SUBSTRATE EFFECTS; TRANSFER MODELS; YOUNG'S MODULUS;

POISSON RATIO; THIN FILMS; VICKERS HARDNESS TESTING;

SUBSTRATES;

EID: 77958035096     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2010.0228     Document Type: Article

References (47)

1. J.B. Pelhica, R. Hulchings, and W.C. Oliver: Hardness measurement at penetration deptlis as small as 20 nm. Philos. Mag. A 48, 593(1983).
2. M.F. Doemer and W.D. Nix: A method tor interpreting data from depth-sensing indentation instruments. J. Mater. Res. 1, 601 (1986).
3. H. Gao, C-H. Chiu, and J. Lee: Elastic contact versus indentation modelling of multi-layered materials. Int. J. Solids Struct. 29, 2471 (1992).
4. G.M. Pharr, D.L. Callahan, S.D. McAdams, T.Y. Tsui, S. Anders, A. Anders, J.W. Agcr III, I.G. Brown, C.S. Bhatia, and S.R.P. Silva: Hardness, elastic modulus, and structure of very hard carbon films produced by calhodic-arc deposition with substrate pulse biasing. Appl. Phys. Lett. 68, 779 (1996).
5. X. Chen and J.J. Vlassak: Numerical study on the measurement of thin film mechanical properties by means of nanoindentation. J. Mater. Res. 16, 2974 (2001).
6. R.B. King: Elastic analysis of some punch problems for a layered medium. Int. J. Solids Struct. 23, 1657 (1987)
7. W.D. Nix: Mechanical properties of thin films. Metall. Mater.A 20,2217 (1989).
8. J.A. Knapp, D.M. Follstaedt, S.M. Myers, J.C. Barbour, and T.A. Friedmann: Finite-element modeling of nanoindentation. .J. Appl. Phys. 85, 1460 (1999).
9. H. Buckle: The Science of Hardness Testing and its Research Applications (ASM, Materials Park, OH, 1973).
10. J. Hay: Measuring substrate-independent modulus of dielectric films by instrumented indentation. J. Mater. Res. 24, 667 (2009).
11. J. Mcnčík, D. Munz, B. Quandt, E.R. Weppelmann, and M.V. Swain: Determination of elastic modulus of thin layers using nanoindentation. J. Mater. Res. 12, 2475 (1997).
12. H. Xu and G.M. Pharr: An improved relation for the effective elastic compliance of a film/substrate system during indentation by a flat cylindrical punch. Scr. Mater. 55, 315 (2006).
13. H. Li and J.J. Vlassak: Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation. J. Mater. Res. 24, 1114 (2009).
14. S. Roche, S. Bee, and J.L. Loubet: Analysis of the elastic modulusof a thin polymer film, in Mechanical Properties Derived from Nanostructuring Materials, edited by D.F. Bahr, H. Kung, MR. Moody, and K.J. Wahl (Mater. Res. Soc. Symp. Proc. 778, Warrcndalc, PA, 2003), p. 117.
15. R. Saha and W.D. Nix: Effects of the substrate on the determination of thin film mechanical properties by nanoindentation. Acta Mater. 50, 23 (2002).
16. H.Y. Yu, S.C. Sanday, and B.B. Rath: The effect of substrate on the elastic properties of films determined by the indentation test- Axisymmetrical Boussinesq problem. J. Mech. Phys. Solids 38, 745 (1990).
17. S.M. Han, R. Saha, and W.D. Nix: Determining hardness of thin films in elastically mismatched film-on-substrate systems using nanoindentation. Acta Mater. 54, 1571 (2006).
18. S. Bee, A. Tonck, J.M. Georges, E. Georges, and J.L. Loubet: Improvements in the indentation method with a surface force apparatus. Phiios. Mag. A 74, 1061 (1996).
19. T. Chudoba, M. Griepentrog, A. Duck, D. Schneider, and F, Richter: Young's modulus measurements on ultra-thin coatings. J. Mater. Res. 19, 301 (2004).
20. N. Schwarzer, F. Richter, and G. Hecht: The elastic field in a coated half-space under Hertzian pressure distribution. Surf. Coat. Technol. 114,292(1999).
21. B. Zhou and B.C. Prorok: A discontinuous elastic interface transfer model of thin film nanoindentation. Exp. Mech. 50, 793 (2010); DOI: 10.1007/s11340-009-9309-7.
22. G.M. Pharr, J.H. Strader, and W.C. Oliver: Critical issues in making small-depth mechanical property measurements by nanoindentation with continuous stiffness measurement. J. Mater. Res. 24, 653 (2009).
23. Z. Wei, G. Zhang, H. Chen, J. Luo, R. Liu, and S. Guo: A simple method for evaluating elastic modulus of thin films by nanoindentation. J. Mater. Res. 24, 801 (2009).
24. B.C. Prorok and H.D. Espinosa: Effects of nanometer-thick passivation layers on the mechanical response of thin gold films. J. Nanosci. Nanoteclmol. 2, 427 (2002).
25. H.D. Espinosa, B.C. Prorok, and M. Fischer: A methodology for determining mechanical properties of freestanding thin films and MEMS materials. J. Mech. Phys. Solids 51, 47 (2003).
26. H.D. Espinosa, B.C. Prorok, and B. Peng: Plasticity size effects in free-standing submicron polycrystalltnc FCC films subjected to pure tension. J. Mech. Phys. Solids 52, 667 (2004).
27. H.D. Espinosa and B.C. Prorok: Size effects on the mechanical behavior of gold thin films. J. Mater. Sci. 38, 4125 (2003).
28. L. Wang and B.C. Prorok: Characterization of the strain rate dependent behavior of nanocrystalline gold films. J. Mater. Res. 23, 55 (2008).
29. L. Wang and B.C. Prorok: Investigation of the influence of grain size, texture and orientation on the mechanical behavior of freestanding polycrystallinc gold films, in Mechanics of Nano-scale Materials and Devices, edited by A. Misra, J.P. Sullivan, H. Huang, K. Lu, and S. Asif (Mater. Res. Soc. Symp. Proc. 924E, Warrendale, PA, 2006), Z03-13.
30. H.D. Espinosa, B.C. Prorok, B. Peng, K.H. Kim, N. Moldovan, O. Aucicllo, J.A. Carlisle, J.A. Orucn, and D.C. Mancini: Mechanical properties of ultrananocryslalline diamond thin films relevant to MEMS/NEMS devices. Exp. Mech. 43, 256 (2003).
31. H.D. Espinosa, B. Peng, B.C. Prorok, N. Moldovan, O. Auciello, J.A. Carlisle, J.A. Gruen, and D.C. Mancini: Fracture strength of ultrananocrystallinc diamond thin films-Identification of Weibull parameters. J. Appl. Phys. 94, 6076 (2003).
32. B. Zhou, L. Wang, N. Mehta, S. Morshed, A. Erdemir, O. Eryilmaz, and B.C. Prorok: The mechanical properties of freestanding near-frictionless carbon films relevant to MEMS. J. Micromech. Microeng. 16, 1374 (2006).
33. B. Zhou, B.C. Prorok, A. Erdemir, and O. Eryilmaz: Annealing effects on the mechanical properties of near-frictionless carbon thin films. Diamond Relat. Mater. 15, 2051 (2006).
34. B. Zhou, B.C. Prorok, A. Erdemir, and O. Eryilmaz: Fabrication issues in constructing freestanding membranes of near-frictionless carbon and diamond-like films. Diamond Relat. Mater. 16,342 (2007).
35. L. Wang, C. Liang, and B.C. Prorok: A comparison of testing methods in assessing the elastic properties of sputter-deposited gold films. Thin Solid Films 515, 7911 (2007).
36. C. Liang and B.C. Prorok: Measuring the thin film elastic modulus with a magnctostrictivc sensor, J. Micromech. Microeng. 17, 709 (2007).
37. C. Liang, S. Morshed, and B.C. Prorok: Correction for longitudinal mode vibration in thin slender beams. Appl. Phys. Lett. 90, 221912(2007).
38. W.C. Oliver and G.M. Pharr: An improved technique for determining hardness and elastic-modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564 (1992).
39. S. Mizuno, A. Vcrma, H. Tran, P. Lee, and B. Nguyen: Dielectric constant and stability of fluorine doped PECVD silicon oxide thin films. Thin Solid Films 283, 30 (1996).
40. X. Li, D, Diao, and B. Bhushan: Fracture mechanisms of thin amorphous carbon films in nanoindentation. Ada Mater. 45,4453 (1997).
41. B. Bhushan and X. Li: Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices. J. Mater. Res. 12, 54 (1997).
42. R.R. Gupta and M.D. Lechner: Landolt-Bonstein-Group III Condensed Matter (Springer, New York, 2005).
43. J.F. Shackelford and W. Alexander: CRC Materials Science and Engineering Handbook (CRC Press, Boca Raton, EL, 2001).
44. M.A. El Khakani, M. Chaker, A. Jean, S. Body, J.C. Kieffer, M.E. O'Hern, M.F. Ravel, and F. Rousseaux: Hardness and Young's modulus of amorphous a-SiC thin films determined by nanoindentation and bulge tests. J. Mater. Res. 9, 96 (1994).
45. P. Boch, J.C. Glandus, J. Jarrige, J.P. Lecompte, and J. Mexmain: Sintering, oxidation and mechanical properties of hot pressed aluminum nitride. Ceram. Int. 8, 34 (1982).
46. P. Hess: Laser diagnostics of mechanical and elastic properties of silicon and carbon films. Appl. Surf Sci. 106, 429 (1996).
47. X. Pang, K. Gao, H. Yang, L, Qiao, Y. Wang, and A. Volinsky: Interfacial microstructure of chromium oxide coatings. Adv. Eng. Mater. 9, 594 (2007).