A discontinuous elastic interface transfer model of thin film nanoindentation

Experimental Mechanics

Volumn 50, Issue 6, 2010, Pages 793-801

  Zhou, B ^a   Prorok, B C ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

Nanoindentation; Substrate effects; Thin film

Indexed keywords

AMORPHOUS THIN FILMS; ELASTIC INTERFACES; ELASTIC STRAIN; EXPERIMENTAL DATA; FILM/SUBSTRATE INTERFACE; FINITE ELEMENT ANALYSIS; HARD SUBSTRATE; MATERIAL PROPERTY; NEW MODEL; NUMERICAL VALUES; PHYSICAL SIGNIFICANCE; POISSON'S RATIO; SILICON SUBSTRATES; SOFT FILM; SUBSTRATE EFFECTS; TRANSFER MODELS; WEIGHTING FACTORS; YOUNG'S MODULUS;

AMORPHOUS FILMS; AMORPHOUS SILICON; LITHIUM COMPOUNDS; NANOINDENTATION; POISSON RATIO; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION;

FINITE ELEMENT METHOD;

EID: 77953870267     PISSN: 00144851     EISSN: 17412765     Source Type: Journal    
DOI: 10.1007/s11340-009-9309-7     Document Type: Article

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