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Volumn , Issue , 1995, Pages 779-
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Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate pulse biasing
a a a a b b b b c d d
c
IBM
(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 36449006164
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.116530 Document Type: Article |
Times cited : (21)
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References (0)
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